Patents by Inventor Horst P. Strunk

Horst P. Strunk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Liquid phase epitaxial process for producing three-dimensional semiconductor structures by liquid phase expitaxy
    Patent number: 5326716
    Abstract: The present invention relates to a new application of the liquid epitaxial method, especially the manufacturing of epitaxial monocrystalline semiconductor layers having high crystalline perfection in multi-layer arrangements on an intermediate layer of an insulating material and/or carbon and/or metal for the manufacturing of a three-dimensional semi-conductor structure, in which low mechanical stresses are present and the charge carrier capacity is available between 10.sup.14 and 10.sup.21 per cubic centimeter, wherein very low process temperatures can be used, namely between 300.degree. and 900.degree. C. The seeding for the epitaxial layer is performed in openings made in the intermediate layer, wherein the monocrystalline material is exposed. From the openings the intermediate layers become overgrown laterally and in a monocrystalline fashion.
    Type: Grant
    Filed: July 15, 1991
    Date of Patent: July 5, 1994
    Assignee: Max Planck-Gesellschaft zur Foerderung der Wissenschaften e.V.
    Inventors: Elisabeth Bauser, Horst P. Strunk