Abstract: Method for manufacturing terminal contacts for thin-film magnetic heads. The method of manufacturing reinforced terminal contacts for thin-film magnetic heads provides a photolithographic process sequence that allows the technical requirements to be kept as low as possible and that reduces the gold consumption to a minimum. To that end, a copper layer for contact reinforcement fashioned as a tower is electrodeposited in contact windows formed by a photoresistive layer, which is electrodeposited onto an electrically conductive permalloy layer of a substrate before this is completely structured and has been provided with a protective aluminum oxide layer. A gold film required for the attachment of a bonding wire is finally deposited either directly preceding the protection or following the application of the aluminum oxide on the copper layer.

Abstract: Method for manufacturing terminal contacts for thin-film magnetic heads. A photolithographic process sequence is desirable when manufacturing coherent terminal contacts for thin-film magnetic heads that allows the technological complexity to be kept as low as possible taking metrological and mechanical points of view into consideration. To that end, an electrically conductive permalloy layer, buried under a protective aluminum oxide layer, is structured with a metallic mask such that interconnects that temporarily short the magnetic heads having two write/read heads on a substrate element during the photolithographic process execution are brought together at a location which is later parted along a parting line. As a result of the short, the application of an additional, metallic carrier layer as a galvanic underlayment for a gold film is avoided.

Abstract: In the fabrication of micro-electronic circuits, it is often necessary to arrange a number of patterned surfaces be well insulated from each other. At the same time, however, the pattern edges of the layer to be overlaid must present a defined slope angle of between the range of forty to sixty degrees, for example. The invention solves this problem through a two stage coating process in which a polymer is first applied which coats the edges and is then coated with a photoresist having good leveling properties.

Abstract: Electrical components which have alternate metal and polymer layers carried on a substrate are produced by fixing the substrates on a rotatable drum and rotating the drum through first and second vacuum chambers which are air-locked with respect to each other. A metal layer is applied in the first vacuum chamber by vapor deposition or sputtering and a polymer layer is provided in the second chamber by a glow discharge operation.

Abstract: A regenerable electric layer capacitor includes a carrier being formed of insulating material and having two sides, aluminum layers of different polarity and dielectric layers produced by glow polymerization alternatingly disposed on the carrier, the aluminum layers of each polarity being extended beyond the dielectric layers toward a different respective side of the carrier, and the aluminum layers containing substantially 1.5 to 10% by weight of copper for prevention of thermomigration.

Abstract: In the preparation of regenerable dielectric layers through polymerization of gases by means of a glow discharge, a siloxane or a silazane or a mixture of siloxanes and/or silazanes is blown into the region of the glow discharge in addition to monomeric perfluoro-hydrocarbons with the empirical formula (CF.sub.2).sub.n and/or the corresponding perfluorized cyclic alkanes.

Abstract: Device for cathode sputtering of metal, comprising a holder, means for cooling the holder, a heat conducting paste layer disposed on the holder, and a target bolted to the holder with the heat conducting paste layer disposed therebetween as a heat transfer medium, the target being formed of the metal to be sputtered. The heat conducting layer may also be metal powder or foil.

Abstract: Device for cathode sputtering of at least two different materials, including a holder, a device for cooling the holder, a heat-conducting layer disposed on the holder, a target being connected to the holder with the heat-conducting layer disposed therebetween, the target being formed of one of the materials to be sputtered and the target having a plurality of blind holes formed therein, and pins formed of another material to be admixed in the sputtering being fitted in at least one of the blind holes.

Abstract: A layer capacitor is disclosed having at least two oppositely polarized metallizations and an intervening dielectric layer consisting of a glow polymerization arranged on a substrate. During production these layers are laterally defined by only one diaphragm. In order to make as great a use of the substrate surface and a rectangular shape of the component as possible, neighboring layers are designed of equal area and are applied in parallel diagonally offset to the edges of the diaphragm aperture.

Abstract: A layer capacitance is disclosed having small dimensions and a high capacitance per volume. A carrier is coated on two frontal sides with metal contact layers. Metal layers and gas discharge polymerization layers are arranged one over the other in alternating fashion upon the carrier. On each of the two surfaces of the carrier, the metal layers extend to the contact layers where they are electrically connected.

Abstract: Apparatus for generating layers on a carrier film wherein a plurality of glow polymerization layers and intervening metal layers are applied to a carrier foil 3 on a continuous process. The carrier foil is passed over a drum 4 and conducted through a first vacuum system wherein glow polymerization electrodes apply glow polymerization layers to the foil then the foil passes through a vacuum lock into a second vacuum chamber wherein a metallization device 10 is situated so as to apply a metallization layer. Then the foil passes through a second vacuum lock to the first vacuum chamber wherein a second polymerization layer is applied over the metallization layer. A diaphragm strip 19 also passes over the foil and is continuously used during the polymerization and metallization steps.

Abstract: A device is disclosed for the formation of electric capacitor metal coatings and glow polymerization coatings to be applied in a vacuum installation in separate vacuum chambers. The air locks which are required between these vacuum chambers are designed to be particularly space saving by providing a transport device which consists of a drum which can only be driven in one direction and wherein the air lock which precedes the vacuum chamber subject to the lower residual gas pressure considered in the flow direction has longer diffusion paths between the vacuum chambers.

Abstract: Method and apparatus for generating layers on a carrier film wherein a plurality of glow polymerization layers and intervening metal layers are applied to a carrier foil 3 on a continuous process. The carrier foil is passed over a drum 4 and conducted through a first vacuum system wherein glow polymerization electrodes apply glow polymerization layers to the foil then the foil passes through a vacuum lock into a second vacuum chamber wherein a metallization device 10 is situated so as to apply a metallization layer. Then the foil passes through a second vacuum lock to the first vacuum chamber wherein a second polymerization layer is applied over the metallization layer. A diaphragm strip 19 also passes over the foil and is continuously used during the polymerization and metallization steps.