Abstract: The present disclosure provides a semiconductor device and a method of forming the same. A method according to one embodiment includes forming a plurality of fins protruding from a substrate, forming first and second dummy gate stacks over the fins, and depositing a cover structure over the fins. A first portion of the cover structure extends between the first and second dummy gate stacks. The method also includes etching the fins to form a first trench between the first dummy gate stack and the first portion of the cover structure and a second trench between the second dummy gate stack and the first portion of the cover structure, removing the cover structure, epitaxially growing a first epitaxial feature from the first trench and a second epitaxial feature from the second trench. The first and second epitaxial features merge after rising above a top surface of the fins.