Patents by Inventor Houchin Tang, legal representative

Houchin Tang, legal representative has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Rotating magnet arrays for magnetron sputtering apparatus
    Patent number: 7585399
    Abstract: In one embodiment, a magnetron sputtering apparatus includes one or more magnet arrays for moving ions or charged particles on at least two plasma discharge paths on a target. Charged particles on one of the plasma discharge paths are moved in one direction, while charged particles on the other plasma discharge path are moved in the opposite direction to reduce rotational shifting of deposition flux on the patterned substrates. The plasma discharge paths may be formed by two symmetric magnet arrays or a single asymmetric magnet array rotated from behind the target.
    Type: Grant
    Filed: March 31, 2005
    Date of Patent: September 8, 2009
    Assignee: Novellus Systems, Inc.
    Inventors: Kwok F. Lai, Houchin Tang, legal representative, Kang Song, Douglas B. Hayden