Abstract: An elevator structure is actuated to remove wafers individually out of a storage cassette to an elevated delivery position. The elevator is a lift blade with an arcuate upper end shaped to match the curvature of the wafers, and a groove within this end adapted to match the thickness of a wafer and retain a wafer edgewise. A wafer-holding chuck on a chuck assembly is adapted to receive a wafer from the elevator when the elevator is in the elevated delivery position. The chuck assembly is movable from the delivery position to a remote position where the chuck presents the wafer to a support member. The support member is provided with an aperture and a plurality of deformable wafer-holding clips spaced around the aperture. The chuck assembly includes a pneumatic cylinder capable of contacting a portion of each clip to urge same to an open position. The invention includes an arrangement in which the chuck is mounted on a chuck assembly in the form of a door for sealing an opening in a process chamber.

Abstract: A flipper is described for a fuse of the type having a generally cylindrical fuse tube, a fusible element within the tube and a fuse leader, the fuse leader having two ends with one of the ends connected to the fusible element disposed within the tube and with the other end of the leader adapted to be connected to a fixed terminal such as one of the two terminals of a power factor capacitor. In one embodiment, the flipper has two elongated arms disposed adjacent one another, a helical torsion spring at one end of each arm, an eyelet connecting together the other end of the arms and adapted to pass through the fuse leader, and a hook or similar connection carried by the springs to mount the flipper assembly to the associated terminal to which the free end of the fuse leader is joined. The flipper assists in the extraction of the leader from the fuse tube and provides positive restraint of the leader after the fuse has blown.

Abstract: The system for rotating the transfer plate of a coating system in a vacuum chamber consists of a transfer plate driver assembly on the outside of the chamber at the axis and a transfer plate rotator assembly inside the chamber. The driver assembly consists of a pneumatic actuator for linear motion, a barrel cam which translates the linear motion into rotary motion with high torque at starting and stopping positions, and a rotary feedthrough all in a structural housing. The rotator assembly comprises a central hub with means for supporting the end walls, a transfer plate hub assembly and a ratchet arm connected to the rotary feedthrough. As the pressure plate assembly is drawn back by the ram, it in turn draws back the transfer plate and engages the ratchet arm with the transfer plate hub. The actuator then rotates the transfer plate. The ram then reverses direction, the ratchet arm disengages and is returned to its initial position.

Abstract: A modular radiation detector array which allows improved spatial resolution and facilitates installation and replacement for repair. Each module includes two detachably assembled portions with one portion including a plurality of spaced plates for collimating radiation. The second portion includes a printed circuit board, a semiconductor diode array chip mounted on the printed circuit board, and a plurality of scintillator crystals mounted on the semiconductor chip with each crystal overlying a diode. Signals from the diodes are applied to signal processing means by a cable which is readily connected to and disconnected from the diode array.

Abstract: A power class fuse comprises an insulative canister having a female load break contact at a closed end of the canister and a male load break contact, coupled electrically to a fuse element. The male load break contact is inserted into the canister for engagement with the female load break contact to complete a circuit through the fuse element. An arc gas control device including a pair of spaced parallel plates each having apertures formed therethrough and filter material sandwiched between the plates, is mounted on the male load break contact. The arc gas control device forms a partition in the canister upon insertion of the male load break contact thereinto. Arc gas generated upon engagement of the male and female load break contacts passes through the control device into the canister interior surrounding the fuse element to reduce back pressure in the canister, while metallic particles and other contaminants which could produce flashovers within the canister, are trapped in the filter material.

Abstract: A system for the automated handling and transfer of wafers individually and repetitively to and between processing stations and cassettes. A track-like conveyor engages a cassette holding a plurality of wafers in vertically facing alignment, to move same horizontally past a loading station of a processing chamber. A vertically moveable blade passes between the conveyor tracks and through the cassette to engage a wafer edgewise from below and move same upwardly to the processing chamber entrance. Vacuum means mounted to the door of the chamber entrance engages and holds the wafer during insertion into the chamber by closure of the door. Clip means are mounted within the periphery of an aperture of a vertical support plate just within the chamber entrance, to engage edgewise the wafer and support it within the plate aperture while in the processing chamber. The wafer is removed after processing by operating the foregoing apparatus in reverse order.

Abstract: An assembly is provided for protectively supporting semiconductor wafers individually within a support while permitting processing of both faces of the wafer, as well as facilitating rapid insertion and removal of wafers into the support, and movement of wafers between processing stations. The assembly includes a plate-like support through which is defined an aperture of diameter larger than the wafer, and a plurality of clips mounted within the periphery of the aperture and the plane thereof and resiliently gripping edgewise a wafer inserted into the aperture and supporting same within the plane of the aperture. Each clip extends centrally inwardly of the aperture and terminates in an arcuate portion within which the edge of the wafer is retained, and defines a flat portion generally parallel to the aperture plane.

Abstract: A flexible mobile conveyor is provided which is particularly useful in deep mining operations. The conveyor comprises a plurality of carriages, a pair of wheels supporting each carriage, an endless conveyor mounted on each carriage, drive means on each carriage engaging and driving the conveyor means, a swivel connection between each pair of carriages permitting generally universal movement between adjacent carriages and a main power source on one of said carriages, driving the supporting wheels.

Abstract: A flexible mobile conveyor is provided which is particularly useful in deep mining operations. The conveyor comprises a plurality of carriages, a pair of wheels supporting each carriage, an endless conveyor mounted on each carriage, drive means on each carriage engaging and driving the conveyor means, a swivel connection between each pair of carriages permitting generally universal movement between adjacent carriages and a main power source on one of said carriages, driving the supporting wheels.