Abstract: The present invention generally relates to a read head in a magnetic recording head. The read head has side-by-side sensors that are formed of the same width by initially forming a single sensor and then removing selected portions of either the pinned or free magnetic layer of the sensor. Then, insulating material is filled into the area from where the selected portions have been removed. A hardmask may be necessary to properly define the side-by-side sensors to ensure that the selected portions of either the pinned or free magnetic layer are removed. The hardmask may be formed by blanket depositing hardmask material and then selectively removing the hardmask material such that the remaining hardmask material is equal to the width of the side-by-side sensors.

Abstract: A system, according to one embodiment, includes a magnetic head having sensor structures disposed laterally along a cross-track direction, each sensor structure having a free layer, a soft bias layer positioned laterally to each sensor structure, an antiparallel coupling layer above each soft bias layer, a magnetic layer above each antiparallel coupling layer, wherein magnetic moments of the soft bias layer and the magnetic layer are antiparallel coupled, and a stabilizing layer above each magnetic layer for stabilizing a magnetic orientation of the magnetic layer. Moreover, opposing faces of the magnetic layers are positioned apart by a distance that causes each magnetic layer to form a magnetic circuit with the associated free layer and the associated soft bias layer.

Abstract: The present invention generally relates to a read head in a magnetic recording head. The read head has side-by-side sensors that are formed of the same width by initially forming a single sensor and then removing selected portions of either the pinned or free magnetic layer of the sensor. Then, insulating material is filled into the area from where the selected portions have been removed. A hardmask may be necessary to properly define the side-by-side sensors to ensure that the selected portions of either the pinned or free magnetic layer are removed. The hardmask may be formed by blanket depositing hardmask material and then selectively removing the hardmask material such that the remaining hardmask material is equal to the width of the side-by-side sensors.

Abstract: Processes and apparatus are described that form a solar cell absorber on a surface of a workpiece by reacting a precursor layer disposed on the surface of the workpiece with an absorber constituent vapor in a heating chamber. The absorber constituent material is delivered from an absorber constituent material delivery system in molten form into a container in the heating chamber and vaporized to be used during the reaction.

Abstract: Magnetic recording heads and associated fabrication methods are disclosed. A heat spreader structure in a magnetic recording head includes a seed layer with a heat spreader layer formed on the seed layer. When the heat spreader layer (e.g., Aluminum Nitride) is grown on the seed layer (e.g., NiTa or Alumina), the heat spreader layer forms a well-oriented crystalline structure that allows for a desired thermal conductivity, such as a thermal conductivity greater than about 55 W/m?K. As a result of using the seed layer, a material such as Aluminum Nitride can be used for a heat spreader layer to effectively dissipate heat in a magnetic recording head.

Abstract: A method and apparatus for oxidizing conductive redeposition in TMR sensors is disclosed. A TMR stack having a first electrode that includes at least a pinned layer and an antiferromagnetic (AFM) layer, a second electrode that includes a free layer and a tunnel barrier is formed. The TMR barrier layer is etched. Redeposition material is oxidized and the barrier is healed using an oxidizing agent selected from the group consisting of ozone and water vapor.

Abstract: A roll-to-roll or reel-to-reel RTP tool including a reactor having a continuous insert placed in a primary gap of the reactor is provided. The primary gap of the reactor is defined by peripheral reactor walls including a top reactor wall, a bottom reactor wall and side reactor walls. The continuous insert includes a continuous process gap through which a continuous workpiece travels between an entry opening and an exit opening of the insert. An inner space exists between at least one of the insert walls and at least a portion of the peripheral reactor walls that make up the primary gap. At least one gas inlet is connected to the inner space, and at least one exhaust opening connects the process gap as well as the inner space to outside the reactor and carries any gaseous products to outside the process gap and the primary gap of the reactor.

Abstract: Processes and apparatus are described that form a solar cell absorber on a surface of a workpiece by reacting a precursor layer disposed on the surface of the workpiece with an absorber constituent vapor in a heating chamber. The absorber constituent material is delivered from an absorber constituent material delivery system in molten form into a container in the heating chamber and vaporized to be used during the reaction.

Abstract: Magnetic recording heads and associated fabrication methods are disclosed. A heat spreader structure in a magnetic recording head includes a seed layer with a heat spreader layer formed on the seed layer. When the heat spreader layer (e.g., Aluminum Nitride) is grown on the seed layer (e.g., NiTa or Alumina), the heat spreader layer forms a well-oriented crystalline structure that allows for a desired thermal conductivity, such as a thermal conductivity greater than about 55 W/m-K. As a result of using the seed layer, a material such as Aluminum Nitride can be used for a heat spreader layer to effectively dissipate heat in a magnetic recording head.

Abstract: Recording heads having an ESD shunt trace and methods of fabricating the same are disclosed. A recording head of the invention includes a first shield, a second shield, an MR read element between the first shield and the second shield, and an ESD shunt trace. The ESD shunt trace is formed from MR layers and is connected to the MR read element and one or both of the first shield and the second shield. One or more of the MR layers forming the ESD shunt trace are processed to reduce the MR properties of the ESD shunt trace. Examples of processing the ESD shunt trace are ion milling, ion implantation, oxidizing, reactive ion etching, sputter etching, wet chemical etching, etc.

Abstract: A method and apparatus for oxidizing conductive redeposition in TMR sensors is disclosed. A TMR barrier layer is etched. Redeposition material is oxidized and the barrier is healed using an oxidizing agent selected from the group consisting of ozone and water vapor.

Abstract: The present invention presents a method for fabricating coil elements for magnetic write heads. A coil pattern is formed on a substrate using photolithographic techniques. The substrate is etched using reactive ion etching, creating a coil-shaped trench in the substrate. Thin film seed layers are deposited using ion beam deposition. The substrate is electroplated with metal filling the trenches with metal. The substrate is chemical mechanical polished to remove excess metal and planarize the air bearing surface of the write head.

Abstract: An article is formed as a substrate having a projection extending outwardly therefrom. The article may be a magnetic recording head and the projection a write pole. The projection has a width in a thinnest dimension measured parallel to a substrate surface of no more than about 0.3 micrometers and a height measured perpendicular to the substrate of not less than about 5 times the width. The article is fabricated by forming an overlying structure on the substrate with an edge thereon, depositing a replication layer lying on the edge, depositing a filler onto the edge and the substrate, so that the filler, the replication layer, and the overlying structure in combination comprise a continuous layer on the substrate, selectively removing at least a portion of the replication layer from a free surface of the continuous layer inwardly toward the substrate, to form a defined cavity, and depositing a projection material into the defined cavity to form the projection.

Abstract: A method and apparatus for oxidizing conductive redeposition in TMR sensors is disclosed. A TMR barrier layer is etched. Redeposition material is oxidized and the barrier is healed using an oxidizing agent selected from the group consisting of ozone and water vapor.

Abstract: A tri-layer anti-reflective coating for use in photolithographic applications, and specifically, for use in ultraviolet photolithographic processes. The tri-layered anti-reflective coating is used to minimize pattern distortion due to reflections from neighboring features in the construction of microcircuits. The tri-layer anti-reflection coating features a first layer, a first dielectric layer, an absorption layer disposed on the first dielectric layer, and a second dielectric layer, which is then disposed between the absorption layer and a photoresist layer. At least the absorption layer and dielectric layers can be formed using vacuum deposition. A unique character of the tri-layer anti-reflective coatings is that it dampens reflections structures having severe topologies and also allows a thinner anti-reflection layer that has a wider process latitude.

Abstract: The present invention presents a method for fabricating coil elements for magnetic write heads. A coil pattern is formed on a substrate using photolithographic techniques. The substrate is etched using reactive ion etching, creating a coil-shaped trench in the substrate. Thin film seed layers are deposited using ion beam deposition. The substrate is electroplated with metal filling the trenches with metal. The substrate is chemical mechanical polished to remove excess metal and planarize the air bearing surface of the write head.

Abstract: An article is formed as a substrate having a projection extending outwardly therefrom. The article may be a magnetic recording head and the projection a write pole. The projection has a width in a thinnest dimension measured parallel to a substrate surface of no more than about 0.3 micrometers and a height measured perpendicular to the substrate of not less than about 5 times the width. The article is fabricated by forming an overlying structure on the substrate with an edge thereon, depositing a replication layer lying on the edge, depositing a filler onto the edge and the substrate, so that the filler, the replication layer, and the overlying structure in combination comprise a continuous layer on the substrate, selectively removing at least a portion of the replication layer from a free surface of the continuous layer inwardly toward the substrate, to form a defined cavity, and depositing a projection material into the defined cavity to form the projection.

Abstract: The present invention presents a method for fabricating coil elements for magnetic write heads. A coil pattern is formed on a substrate using photolithographic techniques. The substrate is etched using reactive ion etching, creating a coil-shaped trench in the substrate. Thin film seed layers are deposited using ion beam deposition. The substrate is electroplated with metal filling the trenches with metal. The substrate is chemical mechanical polished to remove excess metal and planarize the air bearing surface of the write head.

Abstract: A tri-layer anti-reflective coating for use in photolithographic applications, and specifically, for use in ultraviolet photolithographic processes. The tri-layered anti-reflective coating is used to minimize pattern distortion due to reflections from neighboring features in the construction of microcircuits. The tri-layer anti-reflection coating features a first layer, a first dielectric layer, an absorption layer disposed on the first dielectric layer, and a second dielectric layer, which is then disposed between the absorption layer and a photoresist layer. At least the absorption layer and dielectric layers can be formed using vacuum deposition. A unique character of the tri-layer anti-reflective coatings is that it dampens reflections structures having severe topologies and also allows a thinner anti-reflection layer that has a wider process latitude.

Abstract: An article is formed as a substrate having a projection extending outwardly therefrom. The article may be a magnetic recording head and the projection a write pole. The projection has a width in a thinnest dimension measured parallel to a substrate surface of no more than about 0.3 micrometers and a height measured perpendicular to the substrate of not less than about 5 times the width. The article is fabricated by forming an overlying structure on the substrate with an edge thereon, depositing a replication layer lying on the edge, depositing a filler onto the edge and the substrate, so that the filler, the replication layer, and the overlying structure in combination comprise a continuous layer on the substrate, selectively removing at least a portion of the replication layer from a free surface of the continuous layer inwardly toward the substrate, to form a defined cavity, and depositing a projection material into the defined cavity to form the projection.