Patents by Inventor Howard H. Hansen

Howard H. Hansen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of laser annealing of subsurface ion implanted regions
    Patent number: 4379727
    Abstract: A method for annealing ion implanted regions buried in a semiconductor substrate without the undesirable effects of thermal diffusion which includes the radiation of the substrate by a continuous laser having an emission frequency longer than 600 nanometers which the buried ion implanted regions will absorb strongly but which will be substantially unabsorbed by the unimplanted regions.Superior results can be obtained when the substrate is heated to approximately 300.degree. during this laser annealing.
    Type: Grant
    Filed: July 8, 1981
    Date of Patent: April 12, 1983
    Assignee: International Business Machines Corporation
    Inventors: Howard H. Hansen, Jerome B. Lasky, Ronald R. Silverman