Abstract: A flow reactor or flow reactor component includes a base plate, a first fluid module having first and second major surfaces, an internal process fluid passage, and a heat exchange channel in the first major surface, the first major surface stacked on the base plate; a second fluid module having first and second major surfaces, an internal process fluid passage and a heat exchange channel in the first major surface, the first major surface stacked on the second major surface of the first fluid module, optional additional fluid modules of the same configuration as the first and second fluid modules stacked successively on the second fluid module, and a top plate having a heat exchange channel in a bottom major surface thereof with the bottom major surface stacked on an uppermost fluid module of (1) the second fluid module and (2) the optional additional fluid modules.

Abstract: A silicon carbide flow reactor fluidic module comprises a monolithic closed-porosity silicon carbide body and a tortuous fluid passage extending through the silicon carbide body, the tortuous fluid passage lying within two or more layers with the silicon carbide body, the tortuous passage having an interior surface, the interior surface having a surface roughness of less than 10 ?m Ra. A method of forming the fluidic module is also disclosed.

Abstract: A silicon carbide flow reactor fluidic module comprises a monolithic closed-porosity silicon carbide body, a tortuous fluid passage extending through the silicon carbide body, the tortuous fluid passage having an interior surface, and one or more thermal control fluid passages also extending through the silicon carbide body, the interior surface having a surface roughness of less than 10 ?m Ra. A process for forming such modules is also disclosed.