Abstract: A system for fabricating a semiconductor device may include a chamber, an electrostatic chuck used to load a substrate, a power source supplying an RF power to the electrostatic chuck, an impedance matcher between the power source and the electrostatic chuck, and a power transmission unit connecting the electrostatic chuck to the impedance matcher. The power transmission unit may include a power rod, which is connected to the electrostatic chuck and has a first outer diameter, and a coaxial cable. The coaxial cable may include an inner wire, an outer wire, and a dielectric material between the outer and inner wires. The inner wire connects the power rod to the impedance matcher and has a second outer diameter less than the first outer diameter. The outer wire is connected to the chamber and is provided to enclose the inner wire and has a first inner diameter less than the first outer diameter and greater than the second outer diameter.

Abstract: An event processing system for processing events in an event stream is disclosed. The system can execute instructions to receive a continuous data stream related to an application, convert geometry of the continuous data stream into a relation, track a plurality of moving objects in the continuous data stream, determine a relationship between at least a first object and a second object (e.g., a first moving object and a second moving object in the plurality of moving objects) based at least on the geometry of a continuous data stream and the relation. and perform an action based at least one the determined relationship.

Abstract: Systems and methods for query decomposition for scalability of continuous query processing are disclosed. In some examples, it is determined whether a query is fully stateful. If it is, the query may be divided into two functions, an aggregate function and a global function. The aggregate functions may be distributed across multiple distributed nodes and executed in parallel. The global function may then receive the results from the distributed nodes and join the results to achieve the fully stateful result.

Abstract: Techniques for tracking large numbers of moving objects in an event processing system are provided. An input event stream can be received, where the events in the input event stream represent the movement of a plurality of geometries or objects. The input event stream can then be partitioned among a number of processing nodes of the event processing system, thereby enabling parallel processing of one or more continuous queries for tracking the objects. The partitioning can be performed such that each processing node is configured to track objects in a predefined spatial region, and the spatial regions for at least two nodes overlap. This overlapping window enables a single node to find, e.g., all of the objects within a particular distance of a target object, even if the target object is in the process of moving from the region of that node to the overlapping region of another node.

Abstract: An event processing system is disclosed that processes events of an event stream and performs the recovery of events during system failure. The recovery of events is performed by generating output sequence numbers for each deterministic output event generated by the event processing system. In an embodiment, the event processing system determines a current output sequence number of a most recently transmitted output event in a output stream of events, a last output sequence number of an output event corresponding to a most recently processed batch of input events and determines a set of one or more output events of the output stream to be transmitted based on the current sequence number and the last output sequence number. The event processing system then transmits the output events related to the application.

Abstract: Systems and methods for query decomposition for scalability of continuous query processing are disclosed. In some examples, it is determined whether a query is fully stateful. If it is, the query may be divided into two functions, an aggregate function and a global function. The aggregate functions may be distributed across multiple distributed nodes and executed in parallel. The global function may then receive the results from the distributed nodes and join the results to achieve the fully stateful result.

Abstract: An event processing system for processing events in an event stream is disclosed. The system can execute instructions to receive a continuous data stream related to an application, convert geometry of the continuous data stream into a relation, track a plurality of moving objects in the continuous data stream, determine a relationship between at least a first object and a second object (e.g., a first moving object and a second moving object in the plurality of moving objects) based at least on the geometry of a continuous data stream and the relation. and perform an action based at least one the determined relationship.

Abstract: An event processing system is disclosed that processes events of an event stream and performs the recovery of events during system failure. The recovery of events is performed by generating output sequence numbers for each deterministic output event generated by the event processing system. In an embodiment, the event processing system determines a current output sequence number of a most recently transmitted output event in a output stream of events, a last output sequence number of an output event corresponding to a most recently processed batch of input events and determines a set of one or more output events of the output stream to be transmitted based on the current sequence number and the last output sequence number. The event processing system then transmits the output events related to the application.

Abstract: An event processing system for distributing a continuous query, and processing events in an event stream, is disclosed. The system can synchronize timestamps across all partitions by adding a heartbeat propagator component propagating a heartbeat signal for silent partitions. The system can further include a timestamp tracker component that tracks the maximum observed timestamp across all partitions for each batch, and sends this to each partition. The system can distribute partitions of the events to the worker nodes, and instruct a heartbeat propagator component to generate a heartbeat for a first worker node corresponding to an event in a different partition. The system receives outputs from the worker nodes and combines these into a single result corresponding to a continuous query. The system can further implement a timestamp tracker to select a highest timestamp value of a previous batch, and send the value to the worker nodes.

Abstract: Techniques for implementing logical queries in a distributed stream processing system using automatic branching and joins. An exemplary technique includes determining a query is a logical query. The logical query includes two or more summaries based on different groups configured to execute in a single query stage of a stream analytics application. The technique further includes converting the logical query into one or more physical queries. The one or more physical queries are separated into individual query stages, and each of the query stages includes a summary from the two or more summaries that is based on an associated group. The technique further includes generating a directed acyclic graph for the one or more physical queries. The directed acyclic graph includes a physical query transformation for each of the individual query stages.

Abstract: Techniques for processing event streams are provided that retain attributes or fields from a current event or group during stream aggregation. An exemplary technique includes receiving a stream of events having an input shape having a plurality of attributes and executing a query on the stream of events. The executing includes: (i) summarizing data of a first attribute of the plurality of attributes based on an aggregate function to generate values of data for a result-set, (ii) collecting data of events with values that are identical for a second attribute of the plurality of attributes based on a group by function to group the result-set by the second attribute, and (iii) preserving data of a third attribute of the plurality of attributes based on a current function. The technique further includes outputting events having an output shape having the first attribute, the second attribute, and the third attribute.

Abstract: Techniques for processing event streams are provided that use streaming analytics to estimate a target user for dynamic assets. An exemplary technique includes receiving a batch of events that have position data for a potential target, determining one or more polygons that comprise the potential target based on the position data for the potential target, determining an approximate target viewership for the one or more polygons based on a profile or taxonomy of the potential target, associating an advertisement with the one or more polygons based on the approximate target viewership, receiving a continuous stream of events that have position data for a dynamic asset, determining that the one or more polygons include the dynamic asset based on the position data for the dynamic asset, obtaining the advertisement associated with the one or more polygons, and providing the advertisement to a sink for display on the dynamic asset.

Abstract: Techniques for providing fault-tolerant stream processing. An exemplary technique includes writing primary output events to a primary target and secondary output events to one or more secondary targets, where the primary output events are written by a primary server and the secondary output events are written by one or more secondary servers. The technique further includes receiving an election of a new primary server from a synchronization system upon a failure of the primary server, where the new primary server is elected from the one or more secondary servers. The technique further includes determining, by the new primary server, the primary output events that failed to be written to the primary target because of the failure of the primary server, and writing, by the new primary server, the failed primary output events to the primary target using the secondary output events read from the one or more secondary targets.

Abstract: An event processing system is disclosed that processes events of an event stream, performs the recovery of events during system failure and preserves the state of the system reliably and accurately while achieving desired system performance. In an embodiment, the event processing system processes a first batch of events of a continuous input stream of events using a continuous query and generates an output stream of events related to an application. The event processing system identifies one or more operators of the continuous query and determines that an operator is a journaled operator. The event processing system generates a journaled snapshot of a current state of the system based on execution of the journaled operator on at least the first batch of events and stores the journaled snapshot of the current state of the system.

Abstract: Embodiments implement a plug-in architecture supporting adding new data sources to a legacy federated database without the need to recode a federated database manager software module. The federated database manager software module includes an administrative tool and a plug-in framework for interfacing with a data source cartridge. The data source cartridge supplies metadata including a feature table of a newly added data source to the framework and creates a physical query for the newly added data source based on an execution plan generated by the federated database manager software module. The administrative tool generates presentation panes including new data sources added to the legacy federated database.

Abstract: Techniques for managing continuous queries with archived relations are provided. In some examples, a query that includes at least a data stream may be identified. Additionally, the query may be initialized with at least a portion of historical data. Further, in some instances, the query may be evaluated based at least in part on the data stream and the portion of the historical data.

Abstract: Systems and methods described herein are directed towards controlling a level of detail for geostreaming data. In some examples, an identifying event data that includes location information. A polygon may be defined that comprises points on a map corresponding to the event data. A first level of detail may be determined and a fidelity of the polygon may be changed based at least in part on the first level of detail. Second event data may be received that identifies a location of an object. It may be identified whether the object is within the location information and a user interface may be prepared that presents whether the object is in an affected area.

Abstract: Systems and methods described herein are directed towards a test data generator. In some examples, a reference polygon may be received from an application. Additionally a control parameter may be received from the application. Two points on a map may be selected and a path between the two points may be generated. Additional points may be created along the path and test may be generated by processing the additional points. The test data may be provided to the application.

Abstract: Systems and methods described herein are directed towards a flexible event ingestion framework. In some examples, an input source comprising information that identifies a plurality of events may be identified. Additionally, in some examples, an adapter for ingesting the information of the input source may be implemented. At least one additional component for modifying the adapter may be received. The adapter may be modified by implementing the at least one additional component with a transport component and a mapper component as part of ingesting the information. Further, a tuple for at least a first event may be generated based at least in part on the modified adapter, and the tuple may be provided to an event server.

Abstract: Embodiments implement a plug-in architecture supporting adding new data sources to a federated database without the need to recode a federated database manager software module. The federated database manager software module includes a plug-in framework for interfacing with a data source cartridge. The data source cartridge supplies metadata including a feature table of a newly added data source to the framework and creates a physical query for the newly added data source based on an execution plan generated by the federated database manager software module. The data source cartridge returns the result set of the query of the new added data source to the federated database manager software module.