Patents by Inventor HO YOUNG HEO

HO YOUNG HEO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20160268098
    Abstract: A scanning electron microscope capable of controlling the spot of an electron beam and a measurement method using the same. The scanning electron microscope includes electron magnets disposed in a path in which an electron beam irradiated to a sample moves from the electron beam source of the scanning electron microscope to a sample and configured to control and irradiate the spot of the electron beam in a linear electron beam having a different horizontal to vertical ratio. A control unit controls a ratio and direction of the spot of the electron beam by controlling a supply voltage of the electron magnets.
    Type: Application
    Filed: June 12, 2014
    Publication date: September 15, 2016
    Inventors: JONG LIP CHOI, SANG MYEONG LEE, HO YOUNG HEO, YUN GI LEE, SEUNG CHUL OH