Abstract: A method for cleaning substrates in which at least one nozzle arrangement is provided opposite to an exposed surface of a substrate to be cleaned. The nozzle arrangement includes at least two separate nozzles each having a sonic transducer arranged to introduce sonic energy into a liquid media flowing through the respective nozzle towards the surface of the substrate that is to be cleaned in such way that the sonic energy is directed towards the substrate surface. The sonic transducers have different resonant frequencies of the type that at least their respective first and second order harmonics are all different. A liquid media is applied to a surface area of the substrate by flowing liquid media through the at least two separate nozzles of the nozzle arrangement. The nozzles are arranged and positioned with respect to the surface of the substrate such that the media streams of the nozzles at least partially intersect each other prior to reaching the surface of the substrate.