Abstract: An apparatus includes an array of pixels, each pixel including in-cell pixel logic and a piezoelectric micromechanical ultrasonic transducer (PMUT) element, each in-cell pixel logic being communicatively coupled with at least one adjacent pixel in the array. Transceiver electronics may operate the array in a selectable one of a first mode and a second mode. In the first mode, the array may generate a substantially plane ultrasonic wave. In the second mode, the array may generate, from at least one superpixel region, a focused beam of relatively high acoustic pressure, each superpixel region including at least one inner pixel disposed in a central portion of the superpixel region and at least a first group of outer pixels disposed in an outer portion of the superpixel region. The transceiver electronics may be configured to operate the array by configuring at least one in-cell pixel logic.

Abstract: Embodiments of an ultrasonic button and methods for using the ultrasonic button are disclosed. In one embodiment, an ultrasonic button may include an ultrasonic transmitter configured to transmit an ultrasonic wave, a piezoelectric receiver layer configured to receive a reflected wave of the ultrasonic wave, a platen layer configured to protect the ultrasonic transmitter and the piezoelectric receiver layer, a first matching layer configured to match an acoustic impedance of the platen layer with an acoustic impedance of ridges of a finger, and an ultrasonic sensor array configured to detect the finger using the reflected wave.

Abstract: A fingerprint sensor device includes a sensor substrate, a plurality of sensor circuits over a first surface of the sensor substrate, and a transceiver layer located over the plurality of sensor circuits and the first surface of the sensor substrate. The transceiver layer includes a piezoelectric layer and a transceiver electrode positioned over the piezoelectric layer. The piezoelectric layer and the transceiver electrode are configured to generate one or more ultrasonic waves or to receive one or more ultrasonic waves. The fingerprint sensor device may include a cap coupled to the sensor substrate and a cavity formed between the cap and the sensor substrate. The cavity and the sensor substrate may form an acoustic barrier.

Abstract: An ultrasonic sensor pixel includes a substrate, a piezoelectric micromechanical ultrasonic transducer (PMUT) and a sensor pixel circuit. The PMUT includes a piezoelectric layer stack including a piezoelectric layer disposed over a cavity, the cavity being disposed between the piezoelectric layer stack and the substrate, a reference electrode disposed between the piezoelectric layer and the cavity, and one or both of a receive electrode and a transmit electrode disposed on or proximate to a first surface of the piezoelectric layer, the first surface being opposite from the cavity. The sensor pixel circuit is electrically coupled with one or more of the reference electrode, the receive electrode and the transmit electrode and the PMUT and the sensor pixel circuit are integrated with the sensor pixel circuit on the substrate.

Abstract: Methods, systems and storage media are described, each of which may be used to generate an image of an object using ultrasonic plane waves. For example, the generated image may be of a target object positioned on a platen surface. The image may be derived from corrected output signals obtained from a plurality of selected sensor pixels. The corrected output signals may adjust for diffraction of reflected ultrasonic plane waves from a target object positioned on the platen surface. The target object may be a finger or a tip of a stylus.

Abstract: This disclosure provides systems, methods and apparatus relating to electromechanical display devices. In one aspect, a multi-stage interferometric modulator (IMOD) can include a movable reflector that can be moved to different positions to produce different reflected colors. The IMOD can include deformable elements that are coupled to a back side of the movable reflector and provide support to the movable reflector. The deformable elements can provide a restoring force that biases the movable reflector to a resting position. The IMOD can include one or more restoring force modifiers that are configured to increase the restoring force when engaged. The restoring force modifiers can be between the movable reflector and the deformable elements such that the deformable elements contact the restoring force modifiers when the movable reflector is displaced to a contacting position.

Abstract: An array of piezoelectric ultrasonic transducer elements includes a plurality of superpixel regions. Each superpixel region includes at least two pixel sets, a first pixel set of the at least two pixel sets being disposed in a central portion of the superpixel region, and at least a second pixel set being disposed in an outer portion of the superpixel region. An electrical coupling may be provided between the array and transceiver electronics. The transceiver electronics may be configured to operate the array in a selectable one of a first mode and a second mode. In the first mode, the array generates a substantially plane ultrasonic wave having a first acoustic pressure. In the second mode, the array generates, from each superpixel region, a focused beam having a second acoustic pressure that is substantially higher than the first acoustic pressure.

Abstract: An apparatus includes an array of pixels, each pixel including in-cell pixel logic and a piezoelectric micromechanical ultrasonic transducer (PMUT) element, each in-cell pixel logic being communicatively coupled with at least one adjacent pixel in the array. Transceiver electronics may operate the array in a selectable one of a first mode and a second mode. In the first mode, the array may generate a substantially plane ultrasonic wave. In the second mode, the array may generate, from at least one superpixel region, a focused beam of relatively high acoustic pressure, each superpixel region including at least one inner pixel disposed in a central portion of the superpixel region and at least a first group of outer pixels disposed in an outer portion of the superpixel region. The transceiver electronics may be configured to operate the array by configuring at least one in-cell pixel logic.

Abstract: A piezoelectric micromechanical ultrasonic transducer (PMUT) includes a diaphragm disposed over a cavity, the diaphragm including a piezoelectric layer stack including a piezoelectric layer, a first electrode electrically coupled with transceiver circuitry, and a second electrode electrically coupled with the transceiver circuitry. The first electrode may be disposed in a first portion of the diaphragm, and the second electrode may be disposed in a second, separate, portion of the diaphragm. Each of the first and the second electrode is disposed on or proximate to a first surface of the piezoelectric layer, the first surface being opposite from the cavity. The PMUT is configured to transmit first ultrasonic signals by way of the first electrode during a first time period and to receive second ultrasonic signals by way of the second electrode during a second time period, the first time period and the second time period being at least partially overlapping.

Abstract: Embodiments of an ultrasonic button and methods for using the ultrasonic button are disclosed. In one embodiment, an ultrasonic button may include an ultrasonic transmitter configured to transmit an ultrasonic wave, a piezoelectric receiver layer configured to receive a reflected wave of the ultrasonic wave, a platen layer configured to protect the ultrasonic transmitter and the piezoelectric receiver layer, a first matching layer configured to match an acoustic impedance of the platen layer with an acoustic impedance of ridges of a finger, and an ultrasonic sensor array configured to detect the finger using the reflected wave.

Abstract: This disclosure provides systems, methods and apparatus relating to electromechanical display devices. In one aspect, a multi-stage interferometric modulator (IMOD) can include a movable reflector that can be moved to different positions to produce different reflected colors. The IMOD can include deformable elements that are coupled to a back side of the movable reflector and provide support to the movable reflector. The deformable elements can provide a restoring force that biases the movable reflector to a resting position. The IMOD can include one or more restoring force modifiers that are configured to increase the restoring force when engaged. The restoring force modifiers can be between the movable reflector and the deformable elements such that the deformable elements contact the restoring force modifiers when the movable reflector is displaced to a contacting position.