Patents by Inventor Hsen-Lin Wu

Hsen-Lin Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for inspecting errors on a wafer
    Patent number: 7469057
    Abstract: A method and system is disclosed for inspecting defects on a wafer. After acquiring at least one digitized image of at least one portion of a wafer, at least one design database file corresponding to the portion of the wafer is converted into at least one inspection file. After setting one or more error detection thresholds, the digitized image and the inspection file are compared by an inspection tool for detecting defects with regard to the portion of the wafer based on the set error detection thresholds.
    Type: Grant
    Filed: February 18, 2004
    Date of Patent: December 23, 2008
    Assignee: Taiwan Semiconductor Manufacturing Corp
    Inventors: Chang-Cheng Hung, Hung-Chang Hsieh, Hsen-Lin Wu, Tyng-Hao Hsu
  • System and method for inspecting errors on a wafer
    Publication number: 20040165761
    Abstract: A method and system is disclosed for inspecting defects on a wafer. After acquiring at least one digitized image of at least one portion of a wafer, at least one design database file corresponding to the portion of the wafer is converted into at least one inspection file. After setting one or more error detection thresholds, the digitized image and the inspection file are compared by an inspection tool for detecting defects with regard to the portion of the wafer based on the set error detection thresholds.
    Type: Application
    Filed: February 18, 2004
    Publication date: August 26, 2004
    Inventors: Chang-Cheng Hung, Hung-Chang Hsieh, Hsen-Lin Wu, Tyng-Hao Hsu