Abstract: A thin film transistor and a fabrication method thereof are provided. First, a gate is formed on a substrate. Next, a gate insulating layer is formed to cover the gate and then a channel layer is formed on a portion of the gate insulating layer above the gate. Afterwards, a source and a drain are formed on the channel layer. The method of forming the gate includes forming a copper alloy layer containing nitrogen and a copper layer sequentially and then removing a portion of the copper alloy layer containing nitrogen and the copper layer. The source and the drain could be formed by the same fabrication method.

Abstract: Aluminum gate electrode parasitic resistance and capacitance delay suffers performance, and even makes the signal loss to high-resolution and small-size requests for thin film transistor liquid crystal display. An important technology employed in manufacturing thin film transistor is to convert surface of glass substrate into a silicon nitride layer, and subsequently to plate with one of low resistant copper, silver, copper alloy and silver alloy, and finally to form the thin film transistor on the substrate.