Patents by Inventor Hsiang I. FENG

Hsiang I. FENG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SYSTEM AND METHOD FOR REMOVING VOLATILE ORGANIC COMPOUNDS FROM PROCESS GASSES
    Publication number: 20220355242
    Abstract: A VOC removal system removes VOCs from an exhaust fluid of a semiconductor process. The VOC removal system measures current VOC removal parameters and passes them to an analysis model trained with a machine learning process. The analysis model predicts a future VOC removal efficiency based on the current VOC removal parameters. The analysis model generates adjustment parameters based on the current VOC removal parameters and the predicted future VOC removal efficiency. A control system adjusts the VOC removal system based on the adjustment parameters.
    Type: Application
    Filed: May 7, 2021
    Publication date: November 10, 2022
    Inventors: Yen-Cheng LAI, Po-Yuan CHANG, Ting Hsin CHANG, Neng Chuan CHEN, Hsiang I. FENG