Patents by Inventor Hsiang-Ming Lin

Hsiang-Ming Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multivariate RBR tool aging adjuster
    Patent number: 6898471
    Abstract: A multiple run by run process is described. A plurality of tools and a plurality of products to be run on the tools are provided. A desired recipe is calculated for each product on each tool based on a previous recipe used for each product on each tool and deviation of a parameter from a target value. Thereafter, the plurality of products is run on the plurality of tools. The desired recipe is updated after each run of each tool.
    Type: Grant
    Filed: December 31, 2003
    Date of Patent: May 24, 2005
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Cheng-I Sun, Yu Pen Fun, Yi-Chuan Lo, Wei-Hsuang Huang, Hsiang-Ming Lin