Abstract: A method of lithography process is provided. The method includes forming a conductive layer over a reticle. The method includes applying ionized particles to the reticle by a discharging device. The method includes forming a photoresist layer over a semiconductor substrate. The method includes securing the semiconductor substrate by a wafer electrostatic-clamp. The method also includes patterning the photoresist layer by emitting radiation from a radiation source via the reticle.

Abstract: A respiratory function testing system includes an air transforming device, a sound reception device and an operation device. The air transforming device is configured to collect exhaled and/or inhaled air for a predetermined period and generate a wide frequency range sound signal according to the collected respired air. The wide frequency range sound signal at least contains an ultrasonic signal. The sound reception device is configured to receive and record the wide frequency range sound signal as an audio file. The operation device is in communication with the sound reception device and is configured to receive and compute the audio file to generate a respiratory function parameter. Besides, the recorded wide frequency range sound signal may be converted into a spectrogram for further applications, and the computation of the audio file can be replaced by analyzing the spectrogram. A respiratory function testing method corresponding to the respiratory function testing system is also provided.

Abstract: Presented herein are techniques to reduce error probability and eliminate the lingering signal that causes problems during audio signal data transmission. An electroacoustic transducer of a first electronic device receives a data encoded audio signal that includes modulated digital data therein. The data encoded audio signal is demodulated to produce a present input signal that includes a target frequency and a lingering effect of a previously received data encoded audio signal. Lingering cancellation is performed on the present input signal to produce a present output signal from which the lingering effect of the previously received data encoded audio signal has been removed.

Abstract: Presented herein are techniques to reduce error probability and eliminate the lingering signal that causes problems during audio signal data transmission. An electroacoustic transducer of a first electronic device receives a data encoded audio signal that includes modulated digital data therein. The data encoded audio signal is demodulated to produce a present input signal that includes a target frequency and a lingering effect of a previously received data encoded audio signal. Lingering cancellation is performed on the present input signal to produce a present output signal from which the lingering effect of the previously received data encoded audio signal has been removed.

Abstract: An air conditioning module applicable to a partition panel is disclosed herein. The air conditioning module includes a heat exchanger and a blower mounted inside the panel. The partition panel is suitable for assembling a modular personal working compartment in an office. A heat transfer medium is provided to the air conditioning module for generating cooled or heated air for the personal working space. The operation of the air conditioning module can accommodate individual needs, as well as save energy.