Patents by Inventor Hsiao-Chia Wu

Hsiao-Chia Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9508793
    Abstract: A structure for suppressing current leakage and a semiconductor device including the same are provided. The structure for suppressing current leakage includes a substrate of a first conductivity type, a well region of the first conductivity type, an isolation structure and a PN junction diode. The well region is disposed in the substrate. The isolation structure is disposed on the well region. The PN junction diode is disposed on the isolation structure and configured to suppress current leakage of the semiconductor device.
    Type: Grant
    Filed: December 26, 2014
    Date of Patent: November 29, 2016
    Assignee: Episil Technologies Inc.
    Inventors: Hsiao-Chia Wu, Dun-Jen Teng, Chi-Jei Dai
  • Publication number: 20160172436
    Abstract: Provided is a termination structure including a substrate of a first conductivity type, an epitaxial layer of the first conductivity type, a single bulk isolation structure and a bulk doped region of a second conductivity type. The epitaxial layer is disposed on the substrate. The single bulk isolation structure is disposed on the epitaxial layer. The bulk doped region is disposed in the epitaxial layer below the single bulk isolation structure, wherein the doping depth of the bulk doped region has a gradient distribution. A method of forming a termination structure and a semiconductor device having the termination structure are also provided.
    Type: Application
    Filed: June 25, 2015
    Publication date: June 16, 2016
    Inventors: Geng-Tai Ho, Shih-Kuei Ma, Tien-Chun Lee, Meng-Hung Chen, Hsiao-Chia Wu
  • Publication number: 20160118378
    Abstract: A structure for suppressing current leakage and a semiconductor device including the same are provided. The structure for suppressing current leakage includes a substrate of a first conductivity type, a well region of the first conductivity type, an isolation structure and a PN junction diode. The well region is disposed in the substrate. The isolation structure is disposed on the well region. The PN junction diode is disposed on the isolation structure and configured to suppress current leakage of the semiconductor device.
    Type: Application
    Filed: December 26, 2014
    Publication date: April 28, 2016
    Inventors: Hsiao-Chia Wu, Dun-Jen Teng, Chi-Jei Dai
  • Patent number: 8956972
    Abstract: A method for manufacturing a semiconductor thick metal structure includes a thick metal deposition step, a metal patterning step, and a passivation step. In the thick metal deposition step, a Ti—TiN laminated structure is used as an anti-reflection layer to implement 4 ?m metal etching without residue. In the metal patterning step, N2 is used for the protection of a sidewall to implement on a 4 ?m metal concave-convex structure a tilt angle of nearly 90 degrees, and a main over-etching step is added to implement the smoothness of the sidewall of the 4 ?m metal concave-convex structure. A half-filled passivation filling structure is used to implement effective passivation protection of 1.5 um metal gaps having less than 4 um of metal thickness. Manufacturing of the 4 ?m thick metal structure having a linewidth/gap of 1.5 ?m/1.5 ?m is finally implemented.
    Type: Grant
    Filed: October 12, 2012
    Date of Patent: February 17, 2015
    Assignee: CSMC Technologies Fab1 Co., Ltd.
    Inventors: Hsiao-Chia Wu, Shilin Fang, Tse-Huang Lo, Zhengpei Chen, Shu Zhang
  • Patent number: 8889535
    Abstract: The present disclosure provides a semiconductor device and a method for fabricating a semiconductor buried layer. The method includes: preparing a substrate which includes a first oxide layer; forming a first buried layer region in the surface of the substrate by using a photoresist layer with a first buried layer region pattern as a mask, in which a doping state of the first buried layer region is different from a doping state of other region of the substrate; forming a second oxide layer on the surface of the substrate and the first buried layer region; and forming a second buried layer region in the surface of the substrate through self alignment process by using the second oxide layer as a mask. The method disclosed by the present disclosure reduces the complexity of the buried layer procedures and the cost thereof, as well as the probability of crystal defects.
    Type: Grant
    Filed: September 1, 2011
    Date of Patent: November 18, 2014
    Assignees: CSMC Technologies FAB1 Co., Ltd., CSMC Technologies FAB2 Co., Ltd.
    Inventors: Hua Song, Hsiao-Chia Wu, Tse-Huang Lo
  • Publication number: 20140329385
    Abstract: A method for manufacturing a semiconductor thick metal structure includes a thick metal deposition step, a metal patterning step, and a passivation step. In the thick metal deposition step, a Ti—TiN laminated structure is used as an anti-reflection layer to implement 4 ?m metal etching without residue. In the metal patterning step, N2 is used for the protection of a sidewall to implement on a 4 ?m metal concave-convex structure a tilt angle of nearly 90 degrees, and a main over-etching step is added to implement the smoothness of the sidewall of the 4 ?m metal concave-convex structure. A half-filled passivation filling structure is used to implement effective passivation protection of 1.5 um metal gaps having less than 4 um of metal thickness. Manufacturing of the 4 ?m thick metal structure having a linewidth/gap of 1.5 ?m/1.5 ?m is finally implemented.
    Type: Application
    Filed: October 12, 2012
    Publication date: November 6, 2014
    Applicant: CSMC TECHNOLOGIES FAB1 CO., LTD.
    Inventors: Hsiao-Chia Wu, Shilin Fang, Tse-Huang Lo, Zhengpei Chen, Shu Zhang
  • Publication number: 20130134562
    Abstract: The present disclosure provides a semiconductor device and a method for fabricating a semiconductor buried layer. The method includes: preparing a substrate which includes a first oxide layer; forming a first buried layer region in the surface of the substrate by using a photoresist layer with a first buried layer region pattern as a mask, in which a doping state of the first buried layer region is different from a doping state of other region of the substrate; forming a second oxide layer on the surface of the substrate and the first buried layer region; and forming a second buried layer region in the surface of the substrate through self alignment process by using the second oxide layer as a mask. The method disclosed by the present disclosure reduces the complexity of the buried layer procedures and the cost thereof, as well as the probability of crystal defects.
    Type: Application
    Filed: September 1, 2011
    Publication date: May 30, 2013
    Inventors: Hua Song, Hsiao-Chia Wu, Tse-Huang Lo
  • Patent number: 5821564
    Abstract: A PMOS thin film transistor (TFT) with self-align offset region for SRAM application is described. A source and a drain regions are above the gate region. A channel region is formed offset from the gate. An offset region is formed in the channel region having a length of 0.3 to 0.4 .mu.m. The key point of the present invention is the novel offset design of PMOS-TFT as load elements in an SRAM cell. Unlike the conventional offset design which is outside the gate, the offset region of the present invention is a disconnection region inside the gate which can be easily formed by so called self-align technique. Since the gate has a disconnected portion in the offset region, the trench-like profile of the offset region makes the load resistance in the offset region much higher to effectively reduce the leakage current.
    Type: Grant
    Filed: May 23, 1997
    Date of Patent: October 13, 1998
    Assignee: Mosel Vitelic Inc.
    Inventors: Hsiao-Chia Wu, Jung-Cheng Kao, Thomas Chang
  • Patent number: 5728598
    Abstract: The present invention relates to a method of fabricating a SRAM cell that has a low stand-by current. A second polysilicon layer which is used as polysilicon resistor is exactly over a first polysilicon layer. The double polysilicon layer is utilized to reduced a stand-by current. A electric field is generated between the two layers caused by applying different voltage to the two polysilicon layer respectively, and the carriers in the second polysilicon layer will be repeled to form a depletion region, which will increase the resistance of the second polysilicon layer. Therefore, the stand-by current (Isb) will be reduced.
    Type: Grant
    Filed: July 24, 1996
    Date of Patent: March 17, 1998
    Assignee: Mosel Vitelic Inc.
    Inventors: Hsiao-Chia Wu, Jung Kao, Thomas Chang