Patents by Inventor Hsiao-Chiang Yao

Hsiao-Chiang Yao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10644167
    Abstract: A thin film transistor including a flexible substrate, a semiconductor layer, a first gate, and a first gate dielectric layer is provided. The semiconductor layer is located on the flexible substrate. The first gate is located on the flexible substrate and corresponds to a portion of the semiconductor layer. The first gate dielectric layer is located between the first gate and the semiconductor layer. The first gate dielectric layer is in contact with the semiconductor layer, and the hydrogen atom concentration of the first gate dielectric layer is less than 6.5×1020 atoms/cm3. A method of manufacturing the thin film transistor is also provided.
    Type: Grant
    Filed: March 6, 2018
    Date of Patent: May 5, 2020
    Assignees: Industrial Technology Research Institute, Intellectual Property Innovation Corporation
    Inventors: Tai-Jui Wang, Yung-Hui Yeh, Jui-Wen Yang, Hsiao-Chiang Yao, Chun-Hung Chu
  • Publication number: 20190140106
    Abstract: A thin film transistor including a flexible substrate, a semiconductor layer, a first gate, and a first gate dielectric layer is provided. The semiconductor layer is located on the flexible substrate. The first gate is located on the flexible substrate and corresponds to a portion of the semiconductor layer. The first gate dielectric layer is located between the first gate and the semiconductor layer. The first gate dielectric layer is in contact with the semiconductor layer, and the hydrogen atom concentration of the first gate dielectric layer is less than 6.5×1020 atoms/cm3. A method of manufacturing the thin film transistor is also provided.
    Type: Application
    Filed: March 6, 2018
    Publication date: May 9, 2019
    Applicants: Industrial Technology Research Institute, Intellectual Property Innovation Corporation
    Inventors: Tai-Jui Wang, Yung-Hui Yeh, Jui-Wen Yang, Hsiao-Chiang Yao, Chun-Hung Chu
  • Patent number: 10083989
    Abstract: A semiconductor device is provided to include a flexible substrate, a barrier layer, a heat insulating layer, a device layer, a dielectric material later and a stress absorbing layer. The barrier layer is disposed on the flexible substrate. The heat insulating layer is disposed on the barrier layer, wherein the heat insulating layer has a thermal conductivity of less than 20 W/mK. The device layer is disposed on the heat insulating layer. The dielectric material layer is disposed on the device layer, and the dielectric material layer and the heat insulating layer include at least one trench. The stress absorbing layer is disposed on the dielectric material layer, and the stress absorbing layer fills into the at least one trench.
    Type: Grant
    Filed: July 14, 2016
    Date of Patent: September 25, 2018
    Assignee: Industrial Technology Research Institute
    Inventors: Tai-Jui Wang, Tsu-Chiang Chang, Yu-Hua Chung, Wei-Han Chen, Hsiao-Chiang Yao
  • Patent number: 9786790
    Abstract: In one embodiment, a flexible device is provided. The flexible device may include a flexible substrate, a buffer layer, a light reflective layer, and a device layer. The buffer layer is located on the flexible substrate. The light reflective layer is located on the flexible substrate, wherein the light reflective layer has a reflection wavelength of 200 nm˜1100 nm, a reflection ratio of greater than 80%, and a stress direction of the light reflective layer is the same as a stress direction of the flexible substrate. The device layer is located on the light reflective layer and the buffer layer.
    Type: Grant
    Filed: March 7, 2016
    Date of Patent: October 10, 2017
    Assignee: Industrial Technology Research Institute
    Inventors: Ching-Wen Su, Tai-Jui Wang, Hsiao-Chiang Yao, Tsu-Chiang Chang, Bo-Yuan Su
  • Publication number: 20170170329
    Abstract: In one embodiment, a flexible device is provided. The flexible device may include a flexible substrate, a buffer layer, a light reflective layer, and a device layer. The buffer layer is located on the flexible substrate. The light reflective layer is located on the flexible substrate, wherein the light reflective layer has a reflection wavelength of 200 nm˜1100 nm, a reflection ratio of greater than 80%, and a stress direction of the light reflective layer is the same as a stress direction of the flexible substrate. The device layer is located on the light reflective layer and the buffer layer.
    Type: Application
    Filed: March 7, 2016
    Publication date: June 15, 2017
    Inventors: Ching-Wen Su, Tai-Jui Wang, Hsiao-Chiang Yao, Tsu-Chiang Chang, Bo-Yuan Su
  • Publication number: 20170170207
    Abstract: A semiconductor device is provided to include a flexible substrate, a barrier layer, a heat insulating layer, a device layer, a dielectric material later and a stress absorbing layer. The barrier layer is disposed on the flexible substrate. The heat insulating layer is disposed on the barrier layer, wherein the heat insulating layer has a thermal conductivity of less than 20 W/mK. The device layer is disposed on the heat insulating layer. The dielectric material layer is disposed on the device layer, and the dielectric material layer and the heat insulating layer include at least one trench. The stress absorbing layer is disposed on the dielectric material layer, and the stress absorbing layer fills into the at least one trench.
    Type: Application
    Filed: July 14, 2016
    Publication date: June 15, 2017
    Inventors: Tai-Jui Wang, Tsu-Chiang Chang, Yu-Hua Chung, Wei-Han Chen, Hsiao-Chiang Yao
  • Patent number: 9553176
    Abstract: A semiconductor device includes a gate, a first electrode, a first insulating layer, an active layer, an etching stop layer, a second insulating layer, a source, a drain and a second electrode. The first insulating layer covers the gate and the first electrode. The active layer and the etching stop layer are disposed on the first insulating layer above the gate and the first electrode respectively. The second insulating layer covers the active layer and the etching stop layer and has a first opening and a second opening exposing the active layer and a third opening exposing the etching stop layer. The source and the drain are disposed on the second insulating layer and contact with the active layer through the first opening and the second opening respectively. The second electrode is located on the second insulating layer and contacts with the etching stop layer through the third opening.
    Type: Grant
    Filed: September 9, 2015
    Date of Patent: January 24, 2017
    Assignee: Industrial Technology Research Institute
    Inventors: Jing-Yi Yan, Chih-Chieh Hsu, Hsiao-Chiang Yao, Chu-Yin Hung
  • Publication number: 20150380530
    Abstract: A semiconductor device includes a gate, a first electrode, a first insulating layer, an active layer, an etching stop layer, a second insulating layer, a source, a drain and a second electrode. The first insulating layer covers the gate and the first electrode. The active layer and the etching stop layer are disposed on the first insulating layer above the gate and the first electrode respectively. The second insulating layer covers the active layer and the etching stop layer and has a first opening and a second opening exposing the active layer and a third opening exposing the etching stop layer. The source and the drain are disposed on the second insulating layer and contact with the active layer through the first opening and the second opening respectively. The second electrode is located on the second insulating layer and contacts with the etching stop layer through the third opening.
    Type: Application
    Filed: September 9, 2015
    Publication date: December 31, 2015
    Inventors: Jing-Yi Yan, Chih-Chieh Hsu, Hsiao-Chiang Yao, Chu-Yin Hung
  • Patent number: 9165947
    Abstract: A semiconductor device includes a gate, a first electrode, a first insulating layer, an active layer, an etching stop layer, a second insulating layer, a source, a drain and a second electrode. The first insulating layer covers the gate and the first electrode. The active layer and the etching stop layer are disposed on the first insulating layer above the gate and the first electrode respectively. The second insulating layer covers the active layer and the etching stop layer and has a first opening and a second opening exposing the active layer and a third opening exposing the etching stop layer. The source and the drain are disposed on the second insulating layer and contact with the active layer through the first opening and the second opening respectively. The second electrode is located on the second insulating layer and contacts with the etching stop layer through the third opening.
    Type: Grant
    Filed: March 23, 2012
    Date of Patent: October 20, 2015
    Assignee: Industrial Technology Research Institute
    Inventors: Jing-Yi Yan, Chih-Chieh Hsu, Hsiao-Chiang Yao, Chu-Yin Hung
  • Patent number: 8928046
    Abstract: A transistor including a gate, an active stacked structure, a dielectric layer, a source and a drain. The gate is located over a first surface of the dielectric layer. The active stacked structure, including a first active layer and a second active layer, is located over a second surface of the dielectric layer. The source and the drain are located over the second surface of the dielectric layer and at two sides of the active stacked structure and extend between the first active layer and the second active layer of the active stacked structure.
    Type: Grant
    Filed: October 13, 2010
    Date of Patent: January 6, 2015
    Assignee: Industrial Technology Research Institute
    Inventors: Jing-Yi Yan, Chu-Yin Hung, Hsiao-Chiang Yao, Yen-Yu Wu, Yen-Shih Huang
  • Publication number: 20140217400
    Abstract: A semiconductor element structure and a manufacturing method for the same are provided. The semiconductor element structure may comprise a gate electrode, a dielectric layer, an active layer, a source, a drain and a protective layer. The active layer and the gate electrode are disposed on opposing sides of the dielectric layer. The source is disposed on the active layer. The drain is disposed on the active layer. The protective layer is disposed on the active layer. The protective layer may have a hydrogen content less than or equal to 0.1 at % and a sheet resistance higher than or equal to 10? 10 Ohm/sq.
    Type: Application
    Filed: January 31, 2014
    Publication date: August 7, 2014
    Applicant: Industrial Technology Research Institute
    Inventors: Jing-Yi YAN, Chu-Yin HUNG, Liang-Hsiang CHEN, Hsiao-Chiang YAO, Wu-Wei TSAI
  • Publication number: 20130140635
    Abstract: A semiconductor device includes a gate, a first electrode, a first insulating layer, an active layer, an etching stop layer, a second insulating layer, a source, a drain and a second electrode. The first insulating layer covers the gate and the first electrode. The active layer and the etching stop layer are disposed on the first insulating layer above the gate and the first electrode respectively. The second insulating layer covers the active layer and the etching stop layer and has a first opening and a second opening exposing the active layer and a third opening exposing the etching stop layer. The source and the drain are disposed on the second insulating layer and contact with the active layer through the first opening and the second opening respectively. The second electrode is located on the second insulating layer and contacts with the etching stop layer through the third opening.
    Type: Application
    Filed: March 23, 2012
    Publication date: June 6, 2013
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Jing-Yi Yan, Chih-Chieh Hsu, Hsiao-Chiang Yao, Chu-Yin Hung
  • Publication number: 20110254061
    Abstract: A transistor including a gate, an active stacked structure, a dielectric layer, a source and a drain. The gate is located over a first surface of the dielectric layer. The active stacked structure, including a first active layer and a second active layer, is located over a second surface of the dielectric layer. The source and the drain are located over the second surface of the dielectric layer and at two sides of the active stacked structure and extend between the first active layer and the second active layer of the active stacked structure.
    Type: Application
    Filed: October 13, 2010
    Publication date: October 20, 2011
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Jing-Yi Yan, Chu-Yin Hung, Hsiao-Chiang Yao, Yen-Yu Wu, Yen-Shih Huang