Patents by Inventor Hsiao Pei Chung

Hsiao Pei Chung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Heating/cooling pedestal for semiconductor-processing apparatus
    Patent number: 9353441
    Abstract: A pedestal for supporting a substrate includes: a heating plate for heating the substrate; an upper cooling plate for cooling the substrate, installed on the heating plate and provided with an upper fluid path for passing a cooling fluid therethrough; and an lower cooling plate for cooling the substrate, installed under the heating plate and including a lower fluid path for passing a cooling fluid therethrough.
    Type: Grant
    Filed: October 5, 2012
    Date of Patent: May 31, 2016
    Assignee: ASM IP Holding B.V.
    Inventors: Hsiao Pei Chung, Hirofumi Arai, Dai Ishikawa
  • Heating/Cooling Pedestal for Semiconductor-Processing Apparatus
    Publication number: 20140096716
    Abstract: A pedestal for supporting a substrate includes: a heating plate for heating the substrate; an upper cooling plate for cooling the substrate, installed on the heating plate and provided with an upper fluid path for passing a cooling fluid therethrough; and an lower cooling plate for cooling the substrate, installed under the heating plate and including a lower fluid path for passing a cooling fluid therethrough.
    Type: Application
    Filed: October 5, 2012
    Publication date: April 10, 2014
    Applicant: ASM IP Holding B.V.
    Inventors: Hsiao Pei Chung, Hirofumi Arai, Dai Ishikawa