Patents by Inventor Hsien-Hao Liao

Hsien-Hao Liao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of forming a bottle-shaped trench
    Publication number: 20040175877
    Abstract: A method of forming a bottle-shaped trench. A trench is formed in a substrate, wherein the trench has a surface with an upper portion and a lower portion beneath the upper portion. A dielectric layer is formed on the trench surface at the lower portion. Using the dielectric layer as a mask, a nitridation procedure is performed to form a nitride film on the trench surface at the upper portion. The dielectric layer is removed. Using the nitride film as a mask, an isotropic etching procedure is performed to form a space in the trench at the lower portion. Thus, a bottle-shaped trench is formed.
    Type: Application
    Filed: February 20, 2004
    Publication date: September 9, 2004
    Inventors: Shian-Jyh Lin, Chen-Chou Huang, Ming-Cheng Chang, Hsien-Hao Liao, Meng-Hung Chen