Patents by Inventor Hsien-Ta Tseng

Hsien-Ta Tseng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11982019
    Abstract: A crystal growth doping apparatus and a crystal growth doping method are provided. The crystal growth doping apparatus includes a crystal growth furnace and a doping device that includes a feeding tube inserted to the furnace body along an oblique insertion direction, and a storage cover and a gate tube that are disposed in the feeding tube. The feeding tube extends from an outer surface thereof to form a placement opening, and the placement opening is recessed from an edge thereof to form an upper recessed portion and a lower recessed portion along the oblique insertion direction. The storage cover includes a storage tank and a handle. When the storage cover is disposed in the gate tube body, the gate tube body is configured to isolate an inner space of the feeding tube from the placement opening.
    Type: Grant
    Filed: May 27, 2022
    Date of Patent: May 14, 2024
    Assignee: GLOBALWAFERS CO., LTD.
    Inventors: Yu-Chih Chu, Tang-Chi Lin, Han-Sheng Wu, Hsien-Ta Tseng
  • Publication number: 20240125003
    Abstract: A method of growing a single crystal ingot includes growing a single crystal silicon ingot from a silicon melt in a crucible within an inner chamber, adding a volatile dopant into a feed tube, positioning the feed tube within an inner chamber at a first height relative to a surface of the melt, adjusting the feed tube within the inner chamber to a second height at a speed rate, and heating the volatile dopant to form a gaseous dopant as the feed tube is moved from the first height to the second height at the speed rate. Each of the second height and the speed rate are selected to control a vaporization rate of the volatile dopant. The method also includes introducing dopant species into the melt while growing the ingot by contacting the surface of the melt with the gaseous dopant.
    Type: Application
    Filed: October 13, 2022
    Publication date: April 18, 2024
    Inventors: Chieh HU, Hsien-Ta TSENG, Chun-Sheng WU, William Lynn LUTER, Liang-Chin CHEN, Sumeet BHAGAVAT, Carissima Marie HUDSON, Yu-Chiao Wu
  • Publication number: 20240125004
    Abstract: A method of growing a single crystal ingot includes growing a single crystal silicon ingot from a silicon melt in a crucible within an inner chamber, adding a volatile dopant into a feed tube, positioning the feed tube within an inner chamber at a first height relative to a surface of the melt, adjusting the feed tube within the inner chamber to a second height at a speed rate, and heating the volatile dopant to form a gaseous dopant as the feed tube is moved from the first height to the second height at the speed rate. Each of the second height and the speed rate are selected to control a vaporization rate of the volatile dopant. The method also includes introducing dopant species into the melt while growing the ingot by contacting the surface of the melt with the gaseous dopant.
    Type: Application
    Filed: October 13, 2022
    Publication date: April 18, 2024
    Inventors: Chieh HU, Hsien-Ta TSENG, Chun-Sheng WU, William Lynn LUTER, Liang-Chin CHEN, Sumeet BHAGAVAT, Carissima Marie HUDSON, Yu-Chiao Wu
  • Publication number: 20230042128
    Abstract: A crystal growth doping apparatus and a crystal growth doping method are provided. The crystal growth doping apparatus includes a crystal growth furnace and a doping device that includes a feeding tube inserted to the furnace body along an oblique insertion direction, and a storage cover and a gate tube that are disposed in the feeding tube. The feeding tube extends from an outer surface thereof to form a placement opening, and the placement opening is recessed from an edge thereof to form an upper recessed portion and a lower recessed portion along the oblique insertion direction. The storage cover includes a storage tank and a handle. When the storage cover is disposed in the gate tube body, the gate tube body is configured to isolate an inner space of the feeding tube from the placement opening.
    Type: Application
    Filed: May 27, 2022
    Publication date: February 9, 2023
    Inventors: YU-CHIH CHU, Tang-Chi Lin, Han-Sheng Wu, Hsien-Ta Tseng
  • Publication number: 20220259763
    Abstract: A system for producing a silicon ingot, the system includes a crystal puller, a pyrometer, an infrared (IR) camera, and a controller. The crystal puller includes a hot zone having one or more components therein, and in which a silicon ingot may be pulled. The pyrometer is positioned to view a region of interest within the hot zone. The IR camera is positioned to view one or more additional regions of interest within the hot zone. The controller is connected to the crystal puller, the pyrometer, and the IR camera. The controller is programmed to control the crystal puller to produce a silicon ingot, receive temperature data of the region of interest within the hot zone from the pyrometer while producing the silicon ingot, and receive IR images of the one or more additional regions of interest from the IR camera while producing the silicon ingot.
    Type: Application
    Filed: February 15, 2022
    Publication date: August 18, 2022
    Inventors: Zheng Lu, Chi-Yung Chen, Hsien-Ta Tseng, Sumeet S. Bhagavat, Vahid Khalajzadeh
  • Publication number: 20200002838
    Abstract: Methods for producing monocrystalline silicon ingots in which the pull rate during neck growth is monitored are disclosed. A moving average of the pull rate may be calculated and compared to a target moving average to determine if dislocations were not eliminated and the neck is not suitable for producing an ingot main body suspended from the neck.
    Type: Application
    Filed: June 28, 2018
    Publication date: January 2, 2020
    Inventors: Zheng Lu, Chun-Sheng Wu, Feng-Chien Tsai, Chi-Yung Chen, Yeong-Ming Sheu, Hsien-Ta Tseng
  • Publication number: 20200002839
    Abstract: Methods for producing monocrystalline silicon ingots in which the pull rate during neck growth is monitored are disclosed. A moving average of the pull rate may be calculated and compared to a target moving average to determine if dislocations were not eliminated and the neck is not suitable for producing an ingot main body suspended from the neck.
    Type: Application
    Filed: June 28, 2018
    Publication date: January 2, 2020
    Inventors: Zheng Lu, Chun-Sheng Wu, Feng-Chien Tsai, Chi-Yung Chen, Yeong-Ming Sheu, Hsien-Ta Tseng
  • Publication number: 20200002840
    Abstract: Methods for producing monocrystalline silicon ingots in which the pull rate during neck growth is monitored are disclosed. A moving average of the pull rate may be calculated and compared to a target moving average to determine if dislocations were not eliminated and the neck is not suitable for producing an ingot main body suspended from the neck.
    Type: Application
    Filed: June 28, 2018
    Publication date: January 2, 2020
    Inventors: Zheng Lu, Chun-Sheng Wu, Feng-Chien Tsai, Chi-Yung Chen, Yeong-Ming Sheu, Hsien-Ta Tseng