Patents by Inventor Hsien-Yu Tseng

Hsien-Yu Tseng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240096705
    Abstract: A semiconductor device includes a plurality of channel layers vertically separated from one another. The semiconductor device also includes an active gate structure comprising a lower portion and an upper portion. The lower portion wraps around each of the plurality of channel layers. The semiconductor device further includes a gate spacer extending along a sidewall of the upper portion of the active gate structure. The gate spacer has a bottom surface. Moreover, a dummy gate dielectric layer is disposed between the gate spacer and a topmost channel layer of plurality of channel layers. The dummy gate dielectric layer is in contact with a top surface of the topmost channel layer, the bottom surface of the gate spacer, and the sidewall of the gate structure.
    Type: Application
    Filed: November 30, 2023
    Publication date: March 21, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuei-Yu Kao, Chen-Yui Yang, Hsien-Chung Huang, Chao-Cheng Chen, Shih-Yao Lin, Chih-Chung Chiu, Chih-Han Lin, Chen-Ping Chen, Ke-Chia Tseng, Ming-Ching Chang
  • Publication number: 20240046020
    Abstract: The present disclosure provides a method and a non-transitory computer-readable medium for arranging components within a semiconductor device. The method includes providing a plurality of electrical components in a pre-layout, generating a first layout by routing the plurality of electrical components, obtaining a first resistance between a power terminal of the first layout and a first terminal of a first electrical component in the first layout, comparing the first resistance and a first threshold, adjusting routing of the first layout such that the first resistance is less than the first threshold, and generating a tape out file for the semiconductor device according to the first layout.
    Type: Application
    Filed: August 3, 2022
    Publication date: February 8, 2024
    Inventors: HSIEN YU TSENG, WEI-MING CHEN
  • Patent number: 11861285
    Abstract: The present disclosure provides a method for evaluating a heat sensitive structure. The method includes identifying a heat sensitive structure in an integrated circuit design layout and identifying a heat generating structure in the integrated circuit design layout. The method also includes calculating an operating temperature of the heat generating structure by taking a practical current distribution into consideration. The method also includes calculating an anticipated temperature increase for the heat sensitive structure induced by thermal coupling of the heat generating structure at the operating temperature.
    Type: Grant
    Filed: October 14, 2020
    Date of Patent: January 2, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Hsien Yu-Tseng, Wei-Ming Chen
  • Publication number: 20230334220
    Abstract: An electromigration (EM) sign-off methodology that utilizes a system for analyzing an integrated circuit design layout to identify heat sensitive structures, self-heating effects, heat generating structures, and heat dissipating structures. The EM sign-off methodology includes a memory and a processor configured for calculating adjustments of an evaluation temperature for a heat sensitive structure by calculating the effects of self-heating within the temperature sensitive structure as well as additional heating and/or cooling as a function of thermal coupling to surrounding heat generating structures and/or heat dissipating elements located within a defined thermal coupling volume or range of the heat sensitive structures.
    Type: Application
    Filed: June 26, 2023
    Publication date: October 19, 2023
    Inventors: Hsien Yu TSENG, Amit KUNDU, Chun-Wei CHANG, Szu-Lin LIU, Sheng-Feng LIU
  • Publication number: 20230290658
    Abstract: A system for evaluating a heat sensitive structure of an integrated circuit design including a memory for retrieving and storing integrated circuit design layout data, thermal data, process data, and one or more operational parameters, a processor capable of accessing the memory and identifying a target region having a nominal temperature Tnom, first and second heat generating structures within a first impact range of the target region, calculating the temperature increases ?Th1 and ?Th2 in the target region as a result of thermal coupling between the target region and the first and second heat generating structures, and conducting one or more parametric evaluations of the target region at an adjusted evaluation temperature TE=Tnom+?Th1+?Th1 after which a network interface transmits the result(s) of the parametric evaluation(s) for use in a design review.
    Type: Application
    Filed: April 27, 2023
    Publication date: September 14, 2023
    Inventors: Hsien Yu Tseng, Sheng-Feng Liu
  • Publication number: 20230259688
    Abstract: The present disclosure provides a method and a non-transitory computer readable media for inter-metal dielectric reliability check. The method comprises: receiving an electronic layout, the electronic layout including a first plurality of electrical components in a first layer; determining an internal voltage difference within each electrical component in the first layer based on parasitic effect; generating a simulation voltage value for each electrical component in the first layer based on the internal voltage differences; and tagging a pair of electrical components in the first layer when a first voltage difference between the pair of electrical components exceeds a first voltage threshold. The first voltage difference is determined based on the simulation voltage value of each electrical component.
    Type: Application
    Filed: February 16, 2022
    Publication date: August 17, 2023
    Inventors: HSIEN YU TSENG, WEI-MING CHEN
  • Publication number: 20230252216
    Abstract: The present disclosure provides a method and an apparatus for testing a semiconductor device. The method includes providing an active area in an integrated circuit design layout; grouping the active area into a first region and a second region; calculating a first self-heating temperature of the first region of the active area; calculating a second self-heating temperature of the second region of the active area; and determining an Electromigration (EM) evaluation based on the first self-heating temperature and the second self-heating temperature.
    Type: Application
    Filed: April 19, 2023
    Publication date: August 10, 2023
    Inventors: HSIEN YU TSENG, WEI-MING CHEN
  • Patent number: 11687698
    Abstract: An electromigration (EM) sign-off methodology that analyzes an integrated circuit design layout to identify heat sensitive structures, self-heating effects, heat generating structures, and heat dissipating structures. The EM sign-off methodology includes adjustments of an evaluation temperature for a heat sensitive structure by calculating the effects of self-heating within the temperature sensitive structure as well as additional heating and/or cooling as a function of thermal coupling to surrounding heat generating structures and/or heat sink elements located within a defined thermal coupling volume or range.
    Type: Grant
    Filed: March 23, 2022
    Date of Patent: June 27, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsien Yu Tseng, Amit Kundu, Chun-Wei Chang, Szu-Lin Liu, Sheng-Feng Liu
  • Patent number: 11675950
    Abstract: The present disclosure provides a method and an apparatus for testing a semiconductor device. The method includes providing an active area in an integrated circuit design layout; grouping the active area into a first region and a second region; calculating a first self-heating temperature of the first region of the active area; calculating a second self-heating temperature of the second region of the active area; and determining an Electromigration (EM) evaluation based on the first self-heating temperature and the second self-heating temperature.
    Type: Grant
    Filed: April 20, 2021
    Date of Patent: June 13, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Hsien Yu Tseng, Wei-Ming Chen
  • Patent number: 11658049
    Abstract: A method for evaluating a heat sensitive structure involving identifying a heat sensitive structure in an integrated circuit design layout, the heat sensitive structure characterized by a nominal temperature, identifying a heat generating structure within a thermal coupling range of the heat sensitive structure, calculating an operating temperature of the first heat generating structure; calculating a temperature increase or the heat sensitive structure induced by thermal coupling to the heat generating structure at the operating temperature; and performing an electromigration (EM) analysis of the heat sensitive structure at an evaluation temperature obtained by adjusting the nominal temperature by the temperature increase induced by the heat generating structure.
    Type: Grant
    Filed: August 20, 2021
    Date of Patent: May 23, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsien Yu Tseng, Sheng-Feng Liu
  • Publication number: 20220335200
    Abstract: A system including computer readable storage media including executable instructions and one or more processors configured to execute the executable instructions to obtain a schematic netlist and a performance specification for an integrated circuit, determine electrical constraints for nets in the schematic netlist based on the performance specification, determine physical constraints from the electrical constraints, rout the nets in the schematic netlist based on the electrical constraints and the physical constraints, and provide a data file of a layout.
    Type: Application
    Filed: December 6, 2021
    Publication date: October 20, 2022
    Inventors: Hsien Yu Tseng, Guan-Ruei Lu, Wei-Ming Chen, Chih.Chi. Hsiao
  • Publication number: 20220215151
    Abstract: An electromigration (EM) sign-off methodology that analyzes an integrated circuit design layout to identify heat sensitive structures, self-heating effects, heat generating structures, and heat dissipating structures. The EM sign-off methodology includes adjustments of an evaluation temperature for a heat sensitive structure by calculating the effects of self-heating within the temperature sensitive structure as well as additional heating and/or cooling as a function of thermal coupling to surrounding heat generating structures and/or heat sink elements located within a defined thermal coupling volume or range.
    Type: Application
    Filed: March 23, 2022
    Publication date: July 7, 2022
    Inventors: Hsien Yu TSENG, Amit KUNDU, Chun-Wei CHANG, Szu-Lin LIU, Sheng-Feng LIU
  • Publication number: 20220215148
    Abstract: The present disclosure provides a method and an apparatus for testing a semiconductor device. The method includes providing an active area in an integrated circuit design layout; grouping the active area into a first region and a second region; calculating a first self-heating temperature of the first region of the active area; calculating a second self-heating temperature of the second region of the active area; and determining an Electromigration (EM) evaluation based on the first self-heating temperature and the second self-heating temperature.
    Type: Application
    Filed: April 20, 2021
    Publication date: July 7, 2022
    Inventors: Hsien YU TSENG, Wei-Ming CHEN
  • Publication number: 20220147692
    Abstract: A method includes conducting an electromigration (EM) check process on a schematic design, conducting a mitigating process to mitigate one or more electromigration violations identified during conducting the EM check process, and generating a layout design of the schematic design after at least one iteration of a design process including the EM check process and the mitigating process. The EM check process includes selecting at least some circuits in the schematic design as selected circuits for electromigration check, and checking electromigration compliance in the selected circuits. The mitigating process includes one of modifying some circuit layout of the selected circuits, modifying the schematic design, or modifying both the schematic design and some circuit layout of the selected circuits.
    Type: Application
    Filed: January 27, 2022
    Publication date: May 12, 2022
    Inventors: Hsien YU TSENG, Tsun-Yu YANG
  • Publication number: 20220114323
    Abstract: The present disclosure provides a method for evaluating a heat sensitive structure. The method includes identifying a heat sensitive structure in an integrated circuit design layout and identifying a heat generating structure in the integrated circuit design layout. The method also includes calculating an operating temperature of the heat generating structure by taking a practical current distribution into consideration. The method also includes calculating an anticipated temperature increase for the heat sensitive structure induced by thermal coupling of the heat generating structure at the operating temperature.
    Type: Application
    Filed: October 14, 2020
    Publication date: April 14, 2022
    Inventors: HSIEN YU-TSENG, WEI-MING CHEN
  • Patent number: 11288437
    Abstract: An electromigration (EM) sign-off methodology that analyzes an integrated circuit design layout to identify heat sensitive structures, self-heating effects, heat generating structures, and heat dissipating structures. The EM sign-off methodology includes adjustments of an evaluation temperature for a heat sensitive structure by calculating the effects of self-heating within the temperature sensitive structure as well as additional heating and/or cooling as a function of thermal coupling to surrounding heat generating structures and/or heat sink elements located within a defined thermal coupling volume or range.
    Type: Grant
    Filed: December 14, 2020
    Date of Patent: March 29, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsien Yu Tseng, Chun-Wei Chang, Szu-Lin Liu, Amit Kundu, Sheng-Feng Liu
  • Patent number: 11256847
    Abstract: A method includes conducting an electromigration (EM) check process on a schematic design, conducting a mitigating process to mitigate one or more electromigration violations identified during conducting the EM check process, and generating a layout design of the schematic design after at least one iteration of a design process including the EM check process and the mitigating process. The EM check process includes selecting at least some circuits in the schematic design as selected circuits for electromigration check, and checking electromigration compliance in the selected circuits. The mitigating process includes one of modifying some circuit layout of the selected circuits, modifying the schematic design, or modifying both the schematic design and some circuit layout of the selected circuits.
    Type: Grant
    Filed: September 10, 2019
    Date of Patent: February 22, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsien Yu Tseng, Tsun-Yu Yang
  • Publication number: 20210384054
    Abstract: A method for evaluating a heat sensitive structure involving identifying a heat sensitive structure in an integrated circuit design layout, the heat sensitive structure characterized by a nominal temperature, identifying a heat generating structure within a thermal coupling range of the heat sensitive structure, calculating an operating temperature of the first heat generating structure; calculating a temperature increase or the heat sensitive structure induced by thermal coupling to the heat generating structure at the operating temperature; and performing an electromigration (EM) analysis of the heat sensitive structure at an evaluation temperature obtained by adjusting the nominal temperature by the temperature increase induced by the heat generating structure.
    Type: Application
    Filed: August 20, 2021
    Publication date: December 9, 2021
    Inventors: Hsien Yu TSENG, Sheng-Feng LIU
  • Patent number: 11107714
    Abstract: A method for evaluating a heat sensitive structure involving identifying a heat sensitive structure in an integrated circuit design layout, the heat sensitive structure characterized by a nominal temperature, identifying a heat generating structure within a thermal coupling range of the heat sensitive structure, calculating an operating temperature of the first heat generating structure; calculating a temperature increase or the heat sensitive structure induced by thermal coupling to the heat generating structure at the operating temperature; and performing an electromigration (EM) analysis of the heat sensitive structure at an evaluation temperature obtained by adjusting the nominal temperature by the temperature increase induced by the heat generating structure.
    Type: Grant
    Filed: September 6, 2019
    Date of Patent: August 31, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsien Yu Tseng, Sheng-Feng Liu
  • Patent number: 11055470
    Abstract: A method of determining electromigration (EM) compliance of a circuit is performed. The method includes providing a layout of the circuit, the layout comprising one or more metal lines, and changing a property of one or more of the one or more metal lines within one or more nets of a plurality of nets in the layout. Each of the nets includes a subset of the one or more metal lines. The method also includes determining one or more current values drawn only within the one or more nets and comparing the determined one or more current values drawn with corresponding threshold values. Based on the comparison, an indication is provided whether or not the layout is compliant. A pattern of the one or more metal lines in the compliant layout is transferred to a mask to be used in the manufacturing of the circuit on a substrate.
    Type: Grant
    Filed: October 21, 2019
    Date of Patent: July 6, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chin-Shen Lin, Ching-Shun Yang, Hsien Yu-Tseng