Patents by Inventor Hsienting Hou

Hsienting Hou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20070054045
    Abstract: A method for conditioning a heater of a CVD chamber by forming a pre-coating layer on the surface of the heater is provided. Hence, the surface condition of the heater is improved for better thermal efficiency and the surface of the heater is protected from the possible damages of the cleaning gases. Therefore, the lifetime of the heater becomes longer and costs and recovery time for the preventive maintenance of the CVD system can be reduced.
    Type: Application
    Filed: August 25, 2005
    Publication date: March 8, 2007
    Inventor: Hsienting Hou