Patents by Inventor Hsili Chen

Hsili Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Metal plating apparatus and method using solenoid coil
    Patent number: 9809897
    Abstract: A metal plating apparatus includes a chemical bath chamber, an anode disposed at a bottom portion of the chemical bath chamber, and a cathode disposed at a top portion of the chemical bath chamber. A solenoid coil is disposed within the chemical bath chamber between the anode and the cathode. The solenoid coil is arranged to apply a magnetic field during a metal plating process in a direction from the anode to the cathode.
    Type: Grant
    Filed: March 13, 2013
    Date of Patent: November 7, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsili Chen, Kuan-Hsiao Lin, Chung-Yen Yang, Shao-Chien Yang