Patents by Inventor Hsin-Chih Chiang
Hsin-Chih Chiang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240379791Abstract: A semiconductor structure includes semiconductor structure includes a metal gate structure, a plurality of dielectric pillars disposed in the metal gate structure, a source/drain structure disposed at tow side of the metal gate structure, and at least a first connecting structure disposed over one of the dielectric pillars and coupled to the metal gate structure. The first connecting structure overlaps the one of the dielectric pillars entirely from a top view. An area of the first connecting structure is greater than an area of the one of the dielectric pillars from the top view.Type: ApplicationFiled: May 10, 2023Publication date: November 14, 2024Inventors: TA-CHUAN LIAO, CHEN-LIANG CHU, HSIN-CHIH CHIANG, MING-TA LEI, TA-YUAN KUNG
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Publication number: 20240379845Abstract: A medium voltage transistor of a level shifter circuit may include a p-well region in a substrate. Moreover, the medium voltage transistor may include an n-type lightly-doped source/drain (NLDD) region in which an N+ source/drain region of the medium voltage transistor is included. The light doping in the NLDD region enables a threshold voltage (Vi) to be reduced while enabling medium voltage operation at the N+ source/drain region. To reduce the amount of current leakage in the medium voltage transistor due to the light doping in the NLDD region, a buffer layer may be included over and/or on a portion of the NLDD region under a gate structure of the medium voltage transistor. The NLDD region and the thermal region of the medium voltage transistor enables the threshold voltage of the medium voltage transistor while maintaining the same current leakage performance or reducing current leakage in the medium voltage transistor.Type: ApplicationFiled: May 11, 2023Publication date: November 14, 2024Inventors: Chen-Liang CHU, Hsin-Chih CHIANG, Ruey-Hsin LIU, Ta-Yuan KUNG, Ta-Chuan LIAO, Chih-Wen YAO, Ming-Ta LEI
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Publication number: 20240363731Abstract: An embodiment method includes: forming a semiconductor liner layer on exposed surfaces of a fin structure that extends above a dielectric isolation structure disposed over a substrate; forming a first capping layer to laterally surround a bottom portion of the semiconductor liner layer; forming a second capping layer over an upper portion of the semiconductor liner layer; and annealing the fin structure having the semiconductor liner layer, the first capping layer, and the second capping layer thereon, the annealing driving a dopant from the semiconductor liner layer into the fin structure, wherein a dopant concentration profile in a bottom portion of the fin structure is different from a dopant concentration profile in an upper portion of the fin structure.Type: ApplicationFiled: July 10, 2024Publication date: October 31, 2024Inventors: Wei-Chih Kao, Hsin-Che Chiang, Yu-San Chien, Chun-Sheng Liang, Kuo-Hua Pan
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Publication number: 20240321894Abstract: Various embodiments of the present disclosure are directed towards an integrated chip. The integrated chip includes a first well region, a second well region, and a third well region disposed within a semiconductor substrate. The second well region is disposed between the first and second well regions. A first source/drain region is in the first well region. A second source/drain region is in the second well region. A gate structure is on the semiconductor substrate and spaced laterally between the first and second source/drain regions. A contact region is disposed in the third well region. A conductive structure is on the semiconductor substrate and spaced laterally between the second source/drain region and the contact region.Type: ApplicationFiled: May 20, 2024Publication date: September 26, 2024Inventors: Hsin-Chih Chiang, Tung-Yang Lin, Ruey-Hsin Liu, Ming-Ta Lei
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Patent number: 12087844Abstract: An embodiment method includes: forming a semiconductor liner layer on exposed surfaces of a fin structure that extends above a dielectric isolation structure disposed over a substrate; forming a first capping layer to laterally surround a bottom portion of the semiconductor liner layer; forming a second capping layer over an upper portion of the semiconductor liner layer; and annealing the fin structure having the semiconductor liner layer, the first capping layer, and the second capping layer thereon, the annealing driving a dopant from the semiconductor liner layer into the fin structure, wherein a dopant concentration profile in a bottom portion of the fin structure is different from a dopant concentration profile in an upper portion of the fin structure.Type: GrantFiled: July 20, 2023Date of Patent: September 10, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Wei-Chih Kao, Hsin-Che Chiang, Yu-San Chien, Chun-Sheng Liang, Kuo-Hua Pan
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Publication number: 20240271287Abstract: The present disclosure provides a gas sensor. The gas sensor includes a substrate, an insulating layer over the substrate, a conductor layer over and in contact with a top surface of the substrate, and a gas sensing film. The conductor layer includes a conductive pattern having a plurality of openings, and the conductive pattern is embedded in the insulating layer. The gas sensing film is formed over a portion of the conductive pattern.Type: ApplicationFiled: April 17, 2024Publication date: August 15, 2024Inventors: MING-TA LEI, CHIA-HUA CHU, HSIN-CHIH CHIANG, TUNG-TSUN CHEN, CHUN-WEN CHENG
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Publication number: 20240266167Abstract: A semiconductor device includes a semiconductor substrate having a first lattice constant, a fin-shape base protruding from the semiconductor substrate and extending lengthwise in a first direction, nanostructures suspended above the fin-shape base, a metal gate structure wrapping around each of the nanostructures, an epitaxial feature abutting the nanostructures, and inner spacers interposing the epitaxial feature and the metal gate structure. In a cross section perpendicular to the first direction the fin-shape base includes a first layer and a second layer over the first layer. The first layer has a second lattice constant different from the first lattice constant, and the second layer has a third lattice constant different from the second lattice constant. A portion of the metal gate structure is sandwiched between the second layer and a bottommost one of the nanostructures.Type: ApplicationFiled: March 4, 2024Publication date: August 8, 2024Inventors: Hsin-Che Chiang, Wei-Chih Kao, Chun-Sheng Liang, Kuo-Hua Pan
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Publication number: 20240258394Abstract: A method for forming a semiconductor structure is provided. The method for forming the semiconductor structure includes forming an active region extending in a first horizontal direction, forming an isolation structure surrounding the active region, forming a gate dielectric layer over the active region and the isolation structure, forming a gate electrode layer nested within the gate dielectric layer, and removing the gate electrode layer and a first portion of the gate dielectric layer over the isolation structure to form a trench. A second portion of the gate dielectric layer over the active region is left to form first protection features. The method further includes depositing a dielectric layer in the trench.Type: ApplicationFiled: January 31, 2023Publication date: August 1, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Jyun-Hong HUANG, Hsin-Che CHIANG, Wei-Chih KAO
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Patent number: 12027526Abstract: Various embodiments of the present disclosure are directed towards an integrated chip. The integrated chip includes a semiconductor substrate having a device substrate overlying a handle substrate and an insulator layer disposed between the device substrate and the handle substrate. A gate electrode overlies the device substrate between a drain region and a source region. A conductive via extends through the device substrate and the insulator layer to contact the handle substrate. A first isolation structure is disposed within the device substrate and comprises a first isolation segment disposed laterally between the gate electrode and the conductive via. A contact region is disposed within the device substrate between the first isolation segment and the conductive via. A conductive gate electrode directly overlies the first isolation segment and is electrically coupled to the contact region.Type: GrantFiled: September 21, 2022Date of Patent: July 2, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsin-Chih Chiang, Tung-Yang Lin, Ruey-Hsin Liu, Ming-Ta Lei
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Patent number: 11987891Abstract: The present disclosure provides a gas sensor. The gas sensor includes a substrate, a conductor layer over the substrate, wherein the conductor layer includes a conductive pattern including a plurality of openings, the openings being arranged in a repeating pattern, an insulating layer in the plurality of openings and over a top surface of the conductive pattern, wherein the conductive pattern is embedded in the insulating layer, and a gas sensing film over a portion of the insulating layer.Type: GrantFiled: June 20, 2022Date of Patent: May 21, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Ming-Ta Lei, Chia-Hua Chu, Hsin-Chih Chiang, Tung-Tsun Chen, Chun-Wen Cheng
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Publication number: 20230014120Abstract: Various embodiments of the present disclosure are directed towards an integrated chip. The integrated chip includes a semiconductor substrate having a device substrate overlying a handle substrate and an insulator layer disposed between the device substrate and the handle substrate. A gate electrode overlies the device substrate between a drain region and a source region. A conductive via extends through the device substrate and the insulator layer to contact the handle substrate. A first isolation structure is disposed within the device substrate and comprises a first isolation segment disposed laterally between the gate electrode and the conductive via. A contact region is disposed within the device substrate between the first isolation segment and the conductive via. A conductive gate electrode directly overlies the first isolation segment and is electrically coupled to the contact region.Type: ApplicationFiled: September 21, 2022Publication date: January 19, 2023Inventors: Hsin-Chih Chiang, Tung-Yang Lin, Ruey-Hsin Liu, Ming-Ta Lei
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Patent number: 11508757Abstract: Various embodiments of the present disclosure are directed towards an integrated chip. The integrated chip includes a semiconductor substrate having a device substrate overlying a handle substrate and an insulator layer disposed between the device substrate and the handle substrate. A gate electrode overlies the device substrate between a drain region and a source region. A conductive via extends through the device substrate and the insulator layer to contact the handle substrate. A first isolation structure is disposed within the device substrate and comprises a first isolation segment disposed laterally between the gate electrode and the conductive via. A contact region is disposed within the device substrate between the first isolation segment and the conductive via. A conductive gate electrode directly overlies the first isolation segment and is electrically coupled to the contact region.Type: GrantFiled: May 18, 2021Date of Patent: November 22, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsin-Chih Chiang, Tung-Yang Lin, Ruey-Hsin Liu, Ming-Ta Lei
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Publication number: 20220333251Abstract: The present disclosure provides a gas sensor. The gas sensor includes a substrate, a conductor layer over the substrate, wherein the conductor layer includes a conductive pattern including a plurality of openings, the openings being arranged in a repeating pattern, an insulating layer in the plurality of openings and over a top surface of the conductive pattern, wherein the conductive pattern is embedded in the insulating layer, and a gas sensing film over a portion of the insulating layer.Type: ApplicationFiled: June 20, 2022Publication date: October 20, 2022Inventors: MING-TA LEI, CHIA-HUA CHU, HSIN-CHIH CHIANG, TUNG-TSUN CHEN, CHUN-WEN CHENG
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Patent number: 11414763Abstract: The present disclosure provides a method of manufacturing a gas sensor. The method includes the following operations: a substrate is received; a conductor layer is formed over the substrate; the conductor layer is patterned to form a conductor with a plurality of openings by an etching operation, the openings being arranged in a repeating pattern, a minimal dimension of the opening being about 4 micrometers; and a gas-sensing film is formed over the conductor.Type: GrantFiled: December 6, 2019Date of Patent: August 16, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Ming-Ta Lei, Chia-Hua Chu, Hsin-Chih Chiang, Tung-Tsun Chen, Chun-Wen Cheng
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Publication number: 20220223625Abstract: Various embodiments of the present disclosure are directed towards an integrated chip. The integrated chip includes a semiconductor substrate having a device substrate overlying a handle substrate and an insulator layer disposed between the device substrate and the handle substrate. A gate electrode overlies the device substrate between a drain region and a source region. A conductive via extends through the device substrate and the insulator layer to contact the handle substrate. A first isolation structure is disposed within the device substrate and comprises a first isolation segment disposed laterally between the gate electrode and the conductive via. A contact region is disposed within the device substrate between the first isolation segment and the conductive via. A conductive gate electrode directly overlies the first isolation segment and is electrically coupled to the contact region.Type: ApplicationFiled: May 18, 2021Publication date: July 14, 2022Inventors: Hsin-Chih Chiang, Tung-Yang Lin, Ruey-Hsin Liu, Ming-Ta Lei
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Patent number: 11349025Abstract: In some embodiments, the present disclosure relates to a semiconductor device including a semiconductor region over a bulk oxide, which is over a semiconductor substrate. Above the bulk oxide is a lower source region that is laterally spaced from a lower drain region by a lower portion of the semiconductor region. An upper source region is laterally spaced from an upper drain region by an upper portion of the semiconductor region and is vertically spaced from the lower source region and the lower drain region. The upper source region is coupled to the lower source region, and the upper drain region is coupled to the lower drain region. A gate electrode, coupled to the semiconductor substrate and over a gate oxide, is above the upper portion of the semiconductor region. The lower and upper portions of the semiconductor region respectively include a first channel region and a second channel region.Type: GrantFiled: December 20, 2018Date of Patent: May 31, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Hsin-Chih Chiang
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Publication number: 20200135921Abstract: In some embodiments, the present disclosure relates to a semiconductor device including a semiconductor region over a bulk oxide, which is over a semiconductor substrate. Above the bulk oxide is a lower source region that is laterally spaced from a lower drain region by a lower portion of the semiconductor region. An upper source region is laterally spaced from an upper drain region by an upper portion of the semiconductor region and is vertically spaced from the lower source region and the lower drain region. The upper source region is coupled to the lower source region, and the upper drain region is coupled to the lower drain region. A gate electrode, coupled to the semiconductor substrate and over a gate oxide, is above the upper portion of the semiconductor region. The lower and upper portions of the semiconductor region respectively include a first channel region and a second channel region.Type: ApplicationFiled: December 20, 2018Publication date: April 30, 2020Inventor: Hsin-Chih Chiang
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Publication number: 20200109476Abstract: The present disclosure provides a method of manufacturing a gas sensor. The method includes the following operations: a substrate is received; a conductor layer is formed over the substrate; the conductor layer is patterned to form a conductor with a plurality of openings by an etching operation, the openings being arranged in a repeating pattern, a minimal dimension of the opening being about 4 micrometers; and a gas-sensing film is formed over the conductor.Type: ApplicationFiled: December 6, 2019Publication date: April 9, 2020Inventors: MING-TA LEI, CHIA-HUA CHU, HSIN-CHIH CHIANG, TUNG-TSUN CHEN, CHUN-WEN CHENG
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Patent number: 10508345Abstract: Some embodiments of the present disclosure provide a gas sensor in an IOT. The gas sensor includes a substrate, a conductor disposed above the substrate, and a sensing film disposed over the conductor. The conductor has a top-view pattern including a plurality of openings, a minimal dimension of the opening being less than about 4 micrometer; and a perimeter enclosing the opening. Some embodiments of the present disclosure provide a method of manufacturing a gas sensor. The method includes receiving a substrate; forming a conductor, over the substrate; patterning the conductor to form a plurality of openings in the conductor by an etching operation, and forming a gas-sensing film over the conductor. The openings are arranged in a repeating pattern, and a minimal dimension of the opening being about 4 micrometer.Type: GrantFiled: October 8, 2015Date of Patent: December 17, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Ming-Ta Lei, Chia-Hua Chu, Hsin-Chih Chiang, Tung-Tsun Chen, Chun-Wen Cheng
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Patent number: 10014288Abstract: A semiconductor device includes a semiconductor substrate. A first semiconductor region is over a portion of the semiconductor substrate to a first depth. A second semiconductor region is in the first semiconductor region. A third semiconductor region is in the first semiconductor region. A fourth semiconductor region is outside the first semiconductor region. A fifth semiconductor region is outside the first semiconductor region to a fifth depth, the fifth semiconductor region being adjacent the fourth semiconductor region. A sixth semiconductor region is below the fifth semiconductor region and to a sixth depth. The sixth depth is equal to the first depth. A first electrode is connected to the third semiconductor region. A second electrode is connected to the fourth and fifth semiconductor regions. The fifth semiconductor region is configured to cause an increase in a current during a cathode to anode positive bias operation between the first and second electrodes.Type: GrantFiled: June 6, 2016Date of Patent: July 3, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Hsin-Chih Chiang, Tung-Yang Lin, Ruey-Hsin Liu, Ming-Ta Lei