Abstract: An airflow heating module for an equipment front-end module, including: a first perforated plate including a first plurality of holes used as airflow inlets; a second perforated plate including a second plurality of holes used as airflow outlets; a plurality of heaters provided between the first and the second perforated plates; and an active air intake device provided on the first perforated plate to accelerate airflow flowing through the first plurality of holes and past the plurality of heaters, such that the airflow carries heat generated by the heaters and passes through the second plurality of holes. Each of the heaters includes a heating tube and a fin. The fin is formed helically around the heating tube and attached thereto.

Abstract: A solar cell and a manufacturing method thereof are provided. A laser doping process is adopted to form positive and negative doping regions for an accurate control of the doping regions. No metal contact coverage issue arises since a contact opening is formed by later firing process. The solar cell is provided with a comb-like first electrode, a sheet-like second electrode corresponding to the doping regions to obtain high photoelectric conversion efficiency by fully utilizing the space in the semiconductor substrate. Furthermore, the sheet-like second electrode can be formed by a material having high reflectivity to improve the light utilization rate of the solar cell. The manufacturing process of the solar cell is simplified and the processing yield is improved.

Abstract: A camera for measuring the distance to an object is combined with a laser range measuring device by using a beam splitting device so as to simultaneously take the image of the object and measure the distance between the camera and the object. Using the focal length of the lens, the width and height of the image on the image detector, and the distance between the camera and the object, it is then possible to compute the width and height of the object according to the geometrical optics. By means of obtaining the speed of the image moving on the image detector, the camera of the invention further computes the speed of the object which is projected on a plane perpendicular to the optical axis of the lens.

Abstract: A binoculars for capturing images includes two optical systems and a image-capturing device installed in one optical system. The optical system having the image-capturing device includes a beam-splitting element, and the beam-splitting element divides a beam into two beams, wherein one beam is received by eye and another beam is received by the image-capturing device simultaneously. Consequently, the image-capturing device takes photos through the optical system of the binoculars.