Abstract: The present disclosure describes a method of patterning a semiconductor wafer using extreme ultraviolet lithography (EUVL). The method includes receiving an EUVL mask that includes a substrate having a low temperature expansion material, a reflective multilayer over the substrate, a capping layer over the reflective multilayer, and an absorber layer over the capping layer. The method further includes patterning the absorber layer to form a trench on the EUVL mask, wherein the trench has a first width above a target width. The method further includes treating the EUVL mask with oxygen plasma to reduce the trench to a second width, wherein the second width is below the target width. The method may also include treating the EUVL mask with nitrogen plasma to protect the capping layer, wherein the treating of the EUVL mask with the nitrogen plasma expands the trench to a third width at the target width.

Abstract: A lighting touchpad includes a circuit board and a light-emitting element. The circuit board has a touch sensing area, and a plurality of first sensor cells and at least one second sensor cell are formed in the touch sensing area. Each of the first sensor cells has the same first areas, and each of the at least one second sensor cell has a second area smaller than the first area. The light-emitting element is disposed in the touch sensing area and adjacent to the at least one second sensor cell. The configuration of the present invention is helpful to reduce a touch dead zone (also be called an inactive area) of the lighting touchpad.

Abstract: A lighting touchpad includes a circuit board and a light-emitting element. The circuit board has a touch sensing area, and a plurality of first sensor cells and at least one second sensor cell are formed in the touch sensing area. Each of the first sensor cells has the same first areas, and each of the at least one second sensor cell has a second area smaller than the first area. The light-emitting element is disposed in the touch sensing area and adjacent to the at least one second sensor cell. The configuration of the present invention is helpful to reduce a touch dead zone (also be called an inactive area) of the lighting touchpad.

Abstract: The present invention relates to an on-chip electronic device and a method for manufacturing the same. The on-chip electronic device according to the present invention comprises a substrate, a porous layer, a plurality of magnetic bodies, and an electronic member layer. The porous layer is disposed on the substrate and has a plurality of voids; each of the plurality of magnetic bodies is disposed in the plurality of voids, respectively; and the electronic member layer is disposed on one side of the porous layer, such as upper side of or lower sider of the porous layer. Because the plurality of magnetic bodies is used as the core of the inductance, the inductance is increased effectively and the area of the on-chip electronic device is reduced. Besides the manufacturing method according to the present invention is simple and compatible with the current CMOS process, the manufacturing cost can be lowered.

Abstract: A capacitive touch device capable of distinguishing conductor and nonconductor includes a flexible sensor layer receiving a first driving signal, an elastic insulation layer below the flexible sensor layer, and an electrically conductive layer below the elastic insulation layer and receiving a second driving signal synchronous but out of phase to the first driving signal. The flexible sensor layer generates a capacitance variation responsive to an object touching thereon, for identifying the object as a conductor or a nonconductor.

Abstract: An illuminated touch sensitive surface module and an illuminated device are disclosed. The illuminated touch sensitive surface module includes a cosmetic layer, a sensor, a controller and an illuminated device. The cosmetic layer permits light beams to pass through and objects to touch or hover thereon. The controller connects to the sensor and drives an illuminated mode of the illuminated device according to the position information. The illuminated device has many regions and at least one light guild film in which the light beams enter from the side and emit out of a top of individual light guide film. Further, each light guide film has a bottom on which micro members are formed for changing path of the entering light beams and block members for defining the regions. In the illuminated mode, the touched or hovered regions of the illuminated device are illuminated while the other regions are dark.

Abstract: The present invention relates to an on-chip electronic device and a method for manufacturing the same. The on-chip electronic device according to the present invention comprises a substrate, a porous layer, a plurality of magnetic bodies, and an electronic member layer. The porous layer is disposed on the substrate and has a plurality of voids; each of the plurality of magnetic bodies is disposed in the plurality of voids, respectively; and the electronic member layer is disposed on one side of the porous layer, such as upper side of or lower sider of the porous layer. Because the plurality of magnetic bodies is used as the core of the inductance, the inductance is increased effectively and the area of the on-chip electronic device is reduced. Besides the manufacturing method according to the present invention is simple and compatible with the current CMOS process, the manufacturing cost can be lowered.

Abstract: A capacitive touch device capable of distinguishing conductor and nonconductor includes a flexible sensor layer receiving a first driving signal, an elastic insulation layer below the flexible sensor layer, and an electrically conductive layer below the elastic insulation layer and receiving a second driving signal synchronous but out of phase to the first driving signal. The flexible sensor layer generates a capacitance variation responsive to an object touching thereon, for identifying the object as a conductor or a nonconductor.

Abstract: A capacitive touchpad includes a first trace established by a string of first rhombic sensing cells successively in a first direction and a plurality of singular second rhombic sensing cells branched in a second direction from the string of first rhombic sensing cells, and a second trace established by a string of third rhombic sensing cells successively in the first direction and a plurality of singular fourth rhombic sensing cells branched in the second direction from the string of third rhombic sensing cells, and the second rhombic sensing cells are interleaved with the fourth rhombic sensing cells in the first direction. The capacitive touchpad is thus improved in its linearity.

Abstract: An illuminated touch sensitive surface module and an illuminated device are disclosed. The illuminated touch sensitive surface module includes a cosmetic layer, a sensor, a controller and an illuminated device. The cosmetic layer permits light beams to pass through and objects to touch or hover thereon. The controller connects to the sensor and drives an illuminated mode of the illuminated device according to the position information. The illuminated device has many regions and at least one light guild film in which the light beams enter from the side and emit out of a top of individual light guide film. Further, each light guide film has a bottom on which micro members are formed for changing path of the entering light beams and block members for defining the regions. In the illuminated mode, the touched or hovered regions of the illuminated device are illuminated while the other regions are dark.

Abstract: A signal processing method of a multi-finger touch supported touch apparatus having hidden physical button is applied to the multi-finger touch supported touch apparatus having at least one physical button element pair. The method includes the steps of scanning a touch sensor of the multi-finger touch supported touch apparatus continuously, judging whether the physical button element pair is pressed if a total number of the fingers detected is larger than zero and driving a corresponding touch application according to the total number of fingers of a gesture and a button. The structure of the multi-finger touch supported touch apparatus which is stacked includes a Mylar, a first adhesive layer, a printed circuit board having a first part of the physical button element pair and the touch sensor at least, a second adhesive layer, a first metallic layer for holding and a second metallic layer having a second part of the physical button element pair.