Patents by Inventor Hsin-Hsuan CHEN

Hsin-Hsuan CHEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Tester and method for calibrating probe card and device under testing (DUT)
    Patent number: 11852657
    Abstract: A semiconductor tester and a method for calibrating a probe card and a device under testing (DUT) are disclosed. The semiconductor tester includes: a support platform, including a support surface and configured to be able to move along a direction parallel to the support surface and rotate around a rotating shaft perpendicular to the support surface; a probe card including a plurality of probes stretching towards the support platform; and an alignment assembly, including: at least two first laser emitting apparatuses emitting a plurality of first laser beams; and a second laser emitting apparatus emitting a plurality of second laser beams. The first laser beams and the second laser beams are perpendicular to each other and are each arranged sequentially along a direction perpendicular to the support surface. The semiconductor tester aligns a probe card to a DUT with improved accuracy, thereby preventing the damage to the probe card.
    Type: Grant
    Filed: May 14, 2021
    Date of Patent: December 26, 2023
    Assignee: Changxin Memory Technologies, Inc.
    Inventors: You-Hsien Lin, Yung-Shiuan Chen, Tzu-Chia Liu, Hsin-Hsuan Chen, Wei Chou Wang, Shan Zhang, Zhenzheng Jiang, Mingxiu Zhong
  • TESTER AND METHOD FOR CALIBRATING PROBE CARD AND DEVICE UNDER TESTING (DUT)
    Publication number: 20210270868
    Abstract: A semiconductor tester and a method for calibrating a probe card and a device under testing (DUT) are disclosed. The semiconductor tester includes: a support platform, including a support surface and configured to be able to move along a direction parallel to the support surface and rotate around a rotating shaft perpendicular to the support surface; a probe card including a plurality of probes stretching towards the support platform; and an alignment assembly, including: at least two first laser emitting apparatuses emitting a plurality of first laser beams; and a second laser emitting apparatus emitting a plurality of second laser beams. The first laser beams and the second laser beams are perpendicular to each other and are each arranged sequentially along a direction perpendicular to the support surface. The semiconductor tester aligns a probe card to a DUT with improved accuracy, thereby preventing the damage to the probe card.
    Type: Application
    Filed: May 14, 2021
    Publication date: September 2, 2021
    Inventors: You-Hsien LIN, Yung-Shiuan CHEN, Tzu-Chia LIU, Hsin-Hsuan CHEN, Wei Chou WANG, Shan ZHANG, Zhenzheng JIANG, Mingxiu ZHONG