Abstract: A heating system includes first and second heating devices, a temperature sensor, a first controller and a second controller. The first and second heating devices are respectively arranged above a crucible and around the crucible for heating semiconductor material in the crucible. The temperature sensor is configured to detect the temperature of the first heating device and to generate a temperature signal. The first controller is configured to control operation of the first heating device so as to adjust the temperature thereof based on the temperature signal. The second controller is coupled to the second heating device and is configured to control operation of the second heating device so as to adjust the temperature thereof, based on an external control signal.

Abstract: In a method for monitoring and controlling crystal growth during a crystal growing procedure, heights of a plurality of measuring points on a solid-liquid interface of a crystal material disposed in a crucible are measured, and at least one parameter of the crystal growing procedure is optimized based on the measured heights, so that the solid-liquid interface maintains a dome shape with a predetermined curvature during the crystal growing procedure.