Patents by Inventor Hsing-Chien (Andy) Ma

Hsing-Chien (Andy) Ma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Euv reticle carrier with removable pellicle
    Patent number: 6646720
    Abstract: A reticle carrier used in semiconductor manufacture. The carrier includes a bottom cover and a top cover having a transparent window. A protective lid may also be included. The box includes ports to allow nitrogen gas to enter and purge the inside. The transparent window is used for inspection and photochemical clean. However, since no material is available which can suitably handle smaller wavelength radiation, the reticle is removed from the carrier when exposure at these wavelengths is required.
    Type: Grant
    Filed: September 21, 2001
    Date of Patent: November 11, 2003
    Assignee: Intel Corporation
    Inventors: Arun Ramamoorthy, Hsing-Chien (Andy) Ma, Barry R. Lieberman
  • Euv reticle carrier with removable pellicle
    Publication number: 20030058424
    Abstract: A reticle carrier used in semiconductor manufacture. The carrier includes a bottom cover and a top cover having a transparent window. A protective lid may also be included. The box includes ports to allow nitrogen gas to enter and purge the inside. The transparent window is used for inspection and photochemical clean. However, since no material is available which can suitably handle smaller wavelength radiation, the reticle is removed from the carrier when exposure at these wavelengths is required.
    Type: Application
    Filed: September 21, 2001
    Publication date: March 27, 2003
    Inventors: Arun Ramamoorthy, Hsing-Chien Andy Ma, Barry R. Lieberman