Patents by Inventor Hsing-Chih LIN

Hsing-Chih LIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9818779
    Abstract: A semiconductor device is operated for sensing incident light and includes a substrate, a device layer, a semiconductor layer and a color filter layer. The device layer is disposed on the substrate and includes light-sensing regions. The semiconductor layer overlies the device layer and has a first surface and a second surface opposite to the first surface. The first surface is adjacent to the device layer. The semiconductor layer includes microstructures on the second surface. The color filter layer is disposed on the second surface of the semiconductor layer.
    Type: Grant
    Filed: August 14, 2014
    Date of Patent: November 14, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chien-Nan Tu, Yu-Lung Yeh, Hsing-Chih Lin, Chien-Chang Huang, Shih-Shiung Chen
  • Patent number: 9786592
    Abstract: An integrated circuit structure with a back side through silicon via (B/S TSV) therein and a method of forming the same is disclosed. The method includes the steps of: receiving a wafer comprising a substrate having a front side that has a conductor thereon and a back side; forming a back side through silicon via (B/S TSV) from the back side of the substrate to penetrate the substrate; and filling the back side through silicon via (B/S TSV) with a conductive material to form an electrical connection with the conductor. Thus a back side through silicon via penetrates the back side of the substrate and electrically connects to the conductor on the front side of the substrate is formed.
    Type: Grant
    Filed: October 30, 2015
    Date of Patent: October 10, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jeng-Shyan Lin, Dun-Nian Yaung, Hsing-Chih Lin, Jen-Cheng Liu, Min-Feng Kao, Hsun-Ying Huang
  • Publication number: 20170125341
    Abstract: An integrated circuit structure with a back side through silicon via (B/S TSV) therein and a method of forming the same is disclosed. The method includes the steps of: receiving a wafer comprising a substrate having a front side that has a conductor thereon and a back side; forming a back side through silicon via (B/S TSV) from the back side of the substrate to penetrate the substrate; and filling the back side through silicon via (B/S TSV) with a conductive material to form an electrical connection with the conductor. Thus a back side through silicon via penetrates the back side of the substrate and electrically connects to the conductor on the front side of the substrate is formed.
    Type: Application
    Filed: October 30, 2015
    Publication date: May 4, 2017
    Inventors: Jeng-Shyan LIN, Dun-Nian YAUNG, Hsing-Chih LIN, Jen-Cheng LIU, Min-Feng KAO, Hsun-Ying HUANG
  • Patent number: 9620553
    Abstract: A semiconductor device includes a substrate, a semiconductor layer, light-sensing devices, a transparent dielectric layer and a grid shielding layer. The semiconductor layer overlies the substrate, and has a first surface and a second surface opposite to the first surface. The semiconductor layer includes microstructures disposed on the second surface of the semiconductor layer. The light-sensing devices are disposed on the first surface of the semiconductor layer. The transparent dielectric layer is disposed on the second surface of the semiconductor layer, and covers the microstructures. The grid shielding layer extends from the first surface of the semiconductor layer toward the second surface of the semiconductor layer, and surrounds each of the light-sensing devices to separate the light-sensing devices from each other, in which a depth of the grid shielding layer is greater than two-thirds of a thickness of the semiconductor layer.
    Type: Grant
    Filed: June 15, 2016
    Date of Patent: April 11, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chien-Chang Huang, Hsing-Chih Lin, Chien-Nan Tu, Yu-Lung Yeh
  • Patent number: 9577189
    Abstract: A method of forming an RRAM cell structure is provided. The method includes forming dummy features over a substrate, and the dummy features have a gap therebetween. The method also includes depositing an oxide layer over the dummy features while forming a first V-shaped valley on the oxide layer. The method further includes partially planarizing the oxide layer while leaving the first V-shaped valley. In addition, the method includes forming a first electrode over the oxide layer while forming a second V-shaped valley on the first electrode. The method further includes forming a resistance variable layer over the first electrode in a conformal manner. The method still includes forming a second electrode over the resistance variable layer.
    Type: Grant
    Filed: January 6, 2016
    Date of Patent: February 21, 2017
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Hsing-Chih Lin
  • Patent number: 9502556
    Abstract: In a method for manufacturing a semiconductor device, a substrate including a gate structure is provided. A source region and a drain region are formed at opposing sides of the gate structure and an implant region for a resistor device is formed in the substrate. Pocket implant regions are formed in the source region and the drain region. A dielectric layer is formed to cover the gate structure and the substrate. A portion of dopants in the pocket implant regions interact with portions of dopants in the source region and the drain region to form lightly doped drain regions above the pocket implant regions. A resistor region of the resistor device is defined on the implant region. A portion of the dielectric layer is removed to form a spacer on a sidewall of the gate structure and a resistor protection dielectric layer on a portion of the implant region.
    Type: Grant
    Filed: July 1, 2014
    Date of Patent: November 22, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ming-Chi Wu, Yu-Lung Yeh, Chieh-Shuo Liang, Shih-Chang Lin, Meng-Yi Wu, Hsing-Chih Lin
  • Publication number: 20160300877
    Abstract: A semiconductor device includes a substrate, a semiconductor layer, light-sensing devices, a transparent dielectric layer and a grid shielding layer. The semiconductor layer overlies the substrate, and has a first surface and a second surface opposite to the first surface. The semiconductor layer includes microstructures disposed on the second surface of the semiconductor layer. The light-sensing devices are disposed on the first surface of the semiconductor layer. The transparent dielectric layer is disposed on the second surface of the semiconductor layer, and covers the microstructures. The grid shielding layer extends from the first surface of the semiconductor layer toward the second surface of the semiconductor layer, and surrounds each of the light-sensing devices to separate the light-sensing devices from each other, in which a depth of the grid shielding layer is greater than two-thirds of a thickness of the semiconductor layer.
    Type: Application
    Filed: June 15, 2016
    Publication date: October 13, 2016
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chien-Chang HUANG, Hsing-Chih LIN, Chien-Nan TU, Yu-Lung YEH
  • Patent number: 9397130
    Abstract: A semiconductor device includes a substrate, a semiconductor layer, light-sensing devices, a transparent dielectric layer and a grid shielding layer. The semiconductor layer overlies the substrate, and has a first surface and a second surface opposite to the first surface. The semiconductor layer includes microstructures disposed on the second surface of the semiconductor layer. The light-sensing devices are disposed on the first surface of the semiconductor layer. The transparent dielectric layer is disposed on the second surface of the semiconductor layer, and covers the microstructures. The grid shielding layer extends from the first surface of the semiconductor layer toward the second surface of the semiconductor layer, and surrounds each of the light-sensing devices to separate the light-sensing devices from each other, in which a depth of the grid shielding layer is greater than two-thirds of a thickness of the semiconductor layer.
    Type: Grant
    Filed: December 26, 2014
    Date of Patent: July 19, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chien-Chang Huang, Hsing-Chih Lin, Chien-Nan Tu, Yu-Lung Yeh
  • Publication number: 20160190191
    Abstract: A semiconductor device includes a substrate, a semiconductor layer, light-sensing devices, a transparent dielectric layer and a grid shielding layer. The semiconductor layer overlies the substrate, and has a first surface and a second surface opposite to the first surface. The semiconductor layer includes microstructures disposed on the second surface of the semiconductor layer. The light-sensing devices are disposed on the first surface of the semiconductor layer. The transparent dielectric layer is disposed on the second surface of the semiconductor layer, and covers the microstructures. The grid shielding layer extends from the first surface of the semiconductor layer toward the second surface of the semiconductor layer, and surrounds each of the light-sensing devices to separate the light-sensing devices from each other, in which a depth of the grid shielding layer is greater than two-thirds of a thickness of the semiconductor layer.
    Type: Application
    Filed: December 26, 2014
    Publication date: June 30, 2016
    Inventors: Chien-Chang HUANG, Hsing-Chih LIN, Chien-Nan TU, Yu-Lung YEH
  • Publication number: 20160118580
    Abstract: A method of forming an RRAM cell structure is provided. The method includes forming dummy features over a substrate, and the dummy features have a gap therebetween. The method also includes depositing an oxide layer over the dummy features while forming a first V-shaped valley on the oxide layer. The method further includes partially planarizing the oxide layer while leaving the first V-shaped valley. In addition, the method includes forming a first electrode over the oxide layer while forming a second V-shaped valley on the first electrode. The method further includes forming a resistance variable layer over the first electrode in a conformal manner. The method still includes forming a second electrode over the resistance variable layer.
    Type: Application
    Filed: January 6, 2016
    Publication date: April 28, 2016
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Hsing-Chih LIN
  • Patent number: 9269733
    Abstract: A semiconductor device includes a substrate, a semiconductor layer and a switching element. The semiconductor layer is disposed on the substrate. The semiconductor layer has a light-sensing portion and includes microstructures at a side face area corresponding to the light-sensing portion. The switching element is disposed on the semiconductor layer. In the semiconductor device, the switching element and the light-sensing portion are staggered.
    Type: Grant
    Filed: July 11, 2014
    Date of Patent: February 23, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chien-Nan Tu, Yu-Lung Yeh, Hsing-Chih Lin, Chien-Chang Huang
  • Patent number: 9263437
    Abstract: Embodiments of mechanisms for forming a metal-insulator-metal (MIM) capacitor structure are provided. The metal-insulator-metal capacitor structure includes a substrate. The MIM capacitor structure also includes a CBM layer formed on the substrate, and the CBM layer includes a bottom barrier layer, a main metal layer and a top barrier layer. The MIM capacitor structure further includes a first high-k dielectric layer formed on the CBM layer, an insulating layer formed on the first high-k dielectric layer and a second high-k dielectric layer formed on the insulating layer. The MIM capacitor structure also includes a CTM layer formed on the second high-k dielectric layer, and the CBM layer includes a bottom barrier layer, a main metal layer and a top barrier layer.
    Type: Grant
    Filed: December 18, 2013
    Date of Patent: February 16, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Chieh-Shuo Liang, Hsing-Chih Lin, Yu-Lung Yeh, Chih-Ho Tai, Ching-Hung Huang
  • Patent number: 9257486
    Abstract: An RRAM array is provided. The RRAM array includes a plurality of horizontal electrode lines elongated in a horizontal direction. The RRAM array also includes a plurality of conducting structures elongated in a vertical direction. Each of the conducting structures includes a plurality of electrode blocks and a plurality of contact vias which are alternately arranged. The electrode blocks and the electrode lines are on the same horizontal planes. The RRAM array further includes a plurality of resistance variable elements sandwiched between the electrode lines and the electrode blocks.
    Type: Grant
    Filed: March 11, 2014
    Date of Patent: February 9, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Hsing-Chih Lin
  • Patent number: 9246084
    Abstract: Embodiments of a resistive random access memory (RRAM) cell structure are provided. The RRAM cell structure includes a first electrode over a substrate. The RRAM cell structure also includes a resistance variable layer over the first electrode. The resistance variable layer has a first portion in a V-shape. The RRAM cell structure further includes a second electrode over the resistance variable layer.
    Type: Grant
    Filed: January 23, 2014
    Date of Patent: January 26, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Hsing-Chih Lin
  • Publication number: 20160020244
    Abstract: A semiconductor device includes a carrier wafer, a device layer, a first semiconductor layer and a second semiconductor layer. The device layer is disposed on the carrier wafer. The first semiconductor layer is disposed on the device layer, and has a first side face and a second side face opposite to the first side face, in which the first side face is adjacent to the device layer. The second semiconductor layer is disposed on the first semiconductor layer, and has a third side face and a fourth side face opposite to the third side face, in which the fourth side face of the second semiconductor layer is adjacent to the second side face of the first semiconductor layer, and the second semiconductor layer is implanted and annealed.
    Type: Application
    Filed: July 15, 2014
    Publication date: January 21, 2016
    Inventors: Chien-Nan TU, Yu-Lung YEH, Hsing-Chih LIN, Chien-Chang HUANG
  • Publication number: 20160013232
    Abstract: A semiconductor device includes a substrate, a semiconductor layer and a switching element. The semiconductor layer is disposed on the substrate. The semiconductor layer has a light-sensing portion and includes microstructures at a side face area corresponding to the light-sensing portion. The switching element is disposed on the semiconductor layer. In the semiconductor device, the switching element and the light-sensing portion are staggered.
    Type: Application
    Filed: July 11, 2014
    Publication date: January 14, 2016
    Inventors: Chien-Nan TU, Yu-Lung YEH, Hsing-Chih LIN, Chien-Chang HUANG
  • Publication number: 20160005860
    Abstract: In a method for manufacturing a semiconductor device, a substrate including a gate structure is provided. A source region and a drain region are formed at opposing sides of the gate structure and an implant region for a resistor device is formed in the substrate. Pocket implant regions are formed in the source region and the drain region. A dielectric layer is formed to cover the gate structure and the substrate. A portion of dopants in the pocket implant regions interact with portions of dopants in the source region and the drain region to form lightly doped drain regions above the pocket implant regions. A resistor region of the resistor device is defined on the implant region. A portion of the dielectric layer is removed to form a spacer on a sidewall of the gate structure and a resistor protection dielectric layer on a portion of the implant region.
    Type: Application
    Filed: July 1, 2014
    Publication date: January 7, 2016
    Inventors: Ming-Chi WU, Yu-Lung YEH, Chieh-Shuo LIANG, Shih-Chang LIN, Meng-Yi WU, Hsing-Chih LIN
  • Publication number: 20150279885
    Abstract: A semiconductor device is operated for sensing incident light and includes a substrate, a device layer, a semiconductor layer and a color filter layer. The device layer is disposed on the substrate and includes light-sensing regions. The semiconductor layer overlies the device layer and has a first surface and a second surface opposite to the first surface. The first surface is adjacent to the device layer. The semiconductor layer includes microstructures on the second surface. The color filter layer is disposed on the second surface of the semiconductor layer.
    Type: Application
    Filed: August 14, 2014
    Publication date: October 1, 2015
    Inventors: Chien-Nan TU, Yu-Lung YEH, Hsing-Chih LIN, Chien-Chang HUANG, Shih-Shiung CHEN
  • Publication number: 20150263073
    Abstract: An RRAM array is provided. The RRAM array includes a plurality of horizontal electrode lines elongated in a horizontal direction. The RRAM array also includes a plurality of conducting structures elongated in a vertical direction. Each of the conducting structures includes a plurality of electrode blocks and a plurality of contact vias which are alternately arranged. The electrode blocks and the electrode lines are on the same horizontal planes. The RRAM array further includes a plurality of resistance variable elements sandwiched between the electrode lines and the electrode blocks.
    Type: Application
    Filed: March 11, 2014
    Publication date: September 17, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventor: Hsing-Chih LIN
  • Publication number: 20150207065
    Abstract: Embodiments of a resistive random access memory (RRAM) cell structure are provided. The RRAM cell structure includes a first electrode over a substrate. The RRAM cell structure also includes a resistance variable layer over the first electrode. The resistance variable layer has a first portion in a V-shape. The RRAM cell structure further includes a second electrode over the resistance variable layer.
    Type: Application
    Filed: January 23, 2014
    Publication date: July 23, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Hsing-Chih LIN