Patents by Inventor HSING-PANG WANG

HSING-PANG WANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11708642
    Abstract: A mono-crystalline silicon growth apparatus is provided. The mono-crystalline silicon growth apparatus includes a furnace, a support base disposed in the furnace, a crucible disposed on the support base, and a heating module. The support base and the crucible do not rotate relative to the heating module, and an axial direction is defined to be along a central axis of the crucible. The heating module is disposed at an outer periphery of the support base and includes a first heating unit, a second heating unit, and a third heating unit. The first heating unit, the second heating unit, and the third heating unit are respectively disposed at positions with different heights corresponding to the axial direction.
    Type: Grant
    Filed: July 12, 2021
    Date of Patent: July 25, 2023
    Assignee: GlobalWafers Co., Ltd.
    Inventors: Chun-Hung Chen, Hsing-Pang Wang, Wen-Ching Hsu, I-Ching Li
  • Patent number: 11377752
    Abstract: A mono-crystalline silicon growth method includes: providing a furnace, a supporting base and a crucible which do not rotate relative to the furnace, and a heating module disposed at an outer periphery of the supporting base. After solidifying a liquid surface of a silicon melt in the crucible to form a crystal, the heating power of the heating module is successively reduced to appropriately adjust the temperature around the crucible to effectively control a temperature gradient of a thermal field around the crucible, so as to form a mono-crystalline silicon ingot by solidifying the silicon melt.
    Type: Grant
    Filed: December 27, 2019
    Date of Patent: July 5, 2022
    Assignee: GlobalWafers Co., Ltd.
    Inventors: Chun-Hung Chen, Hsing-Pang Wang, Wen-Ching Hsu, I-Ching Li
  • Patent number: 11326272
    Abstract: A mono-crystalline silicon growth apparatus includes a furnace, a support base, a crucible, a heating module disposed outside of the crucible, and a heat adjusting module above the crucible. The heat adjusting module includes a diversion tube, a plurality of heat preservation sheets, and a hard shaft. The diversion tube includes a tube body and a carrying body connected to the tube body. The heat preservation sheets are sleeved around the tube body and are stacked and disposed on the carrying body. The hard shaft passes through the tube body and does not rotate. The hard shaft includes a water flow channel disposed therein and a clamping portion configured to clamp a seed crystal. Therefore, a fluid injected into the water flow channel takes away the heat near the clamping portion. A heat adjusting module and a hard shaft of the mono-crystalline silicon growth apparatus are provided.
    Type: Grant
    Filed: December 27, 2019
    Date of Patent: May 10, 2022
    Assignee: GlobalWafers Co., Ltd.
    Inventors: Chun-Hung Chen, Hsing-Pang Wang, Wen-Ching Hsu, I-Ching Li
  • Publication number: 20210332496
    Abstract: A mono-crystalline silicon growth apparatus is provided. The mono-crystalline silicon growth apparatus includes a furnace, a support base disposed in the furnace, a crucible disposed on the support base, and a heating module. The support base and the crucible do not rotate relative to the heating module, and an axial direction is defined to be along a central axis of the crucible. The heating module is disposed at an outer periphery of the support base and includes a first heating unit, a second heating unit, and a third heating unit. The first heating unit, the second heating unit, and the third heating unit are respectively disposed at positions with different heights corresponding to the axial direction.
    Type: Application
    Filed: July 12, 2021
    Publication date: October 28, 2021
    Inventors: CHUN-HUNG CHEN, HSING-PANG WANG, Wen-Ching Hsu, I-CHING LI
  • Publication number: 20200208296
    Abstract: A mono-crystalline silicon growth method includes: providing a furnace, a supporting base and a crucible which do not rotate relative to the furnace, and a heating module disposed at an outer periphery of the supporting base. After solidifying a liquid surface of a silicon melt in the crucible to form a crystal, the heating power of the heating module is successively reduced to appropriately adjust the temperature around the crucible to effectively control a temperature gradient of a thermal field around the crucible, so as to form a mono-crystalline silicon ingot by solidifying the silicon melt.
    Type: Application
    Filed: December 27, 2019
    Publication date: July 2, 2020
    Inventors: CHUN-HUNG CHEN, HSING-PANG WANG, WEN-CHING HSU, I-CHING LI
  • Publication number: 20200208295
    Abstract: A mono-crystalline silicon growth apparatus includes a furnace, a support base, a crucible, a heating module disposed outside of the crucible, and a heat adjusting module above the crucible. The heat adjusting module includes a diversion tube, a plurality of heat preservation sheets, and a hard shaft. The diversion tube includes a tube body and a carrying body connected to the tube body. The heat preservation sheets are sleeved around the tube body and are stacked and disposed on the carrying body. The hard shaft passes through the tube body and does not rotate. The hard shaft includes a water flow channel disposed therein and a clamping portion configured to clamp a seed crystal. Therefore, a fluid injected into the water flow channel takes away the heat near the clamping portion. A heat adjusting module and a hard shaft of the mono-crystalline silicon growth apparatus are provided.
    Type: Application
    Filed: December 27, 2019
    Publication date: July 2, 2020
    Inventors: CHUN-HUNG CHEN, HSING-PANG WANG, Wen-Ching Hsu, I-CHING LI