Patents by Inventor Hsiu-Hao Tsao

Hsiu-Hao Tsao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • FINFET DEVICE AND METHOD
    Publication number: 20210111272
    Abstract: A method includes forming a fin on a substrate, forming an insulating material over the fin, recessing the insulating material to form an isolation region surrounding the fin, wherein an upper portion of the fin protrudes above the isolation region, performing a trimming process to reduce a width of the upper portion of the fin, and forming a gate structure extending over the isolation region and the upper portion of the fin.
    Type: Application
    Filed: December 7, 2020
    Publication date: April 15, 2021
    Inventors: Chung-Shu Wu, Ying-Ya Hsu, Ching-Yu Pan, Hsiu-Hao Tsao, An Chyi Wei, Yuan-Hung Chiu
  • FinFET device and method
    Patent number: 10861960
    Abstract: A method includes forming a fin on a substrate, forming an insulating material over the fin, recessing the insulating material to form an isolation region surrounding the fin, wherein an upper portion of the fin protrudes above the isolation region, performing a trimming process to reduce a width of the upper portion of the fin, and forming a gate structure extending over the isolation region and the upper portion of the fin.
    Type: Grant
    Filed: July 31, 2019
    Date of Patent: December 8, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung-Shu Wu, Ying-Ya Hsu, Ching-Yu Pan, Hsiu-Hao Tsao, An Chyi Wei, Yuan-Hung Chiu