Abstract: An equipment for producing a film comprises a linear plasma generating module and a plasma distributing module. When the plasma flows out from the slit opening of the linear plasma generating module, the sleeve of the plasma distributing module rotates with respect to the liner plasma generating module, so that the plasma flowing out from the slit opening is further uniformly distributed outward by passing through the plurality of holes of the sleeve. The equipment for producing a film is applicable to selenization sulfuring process of the glass substrate.

Abstract: An apparatus for making an absorbing layer of a compound solar cell includes a transportation unit, a coating unit, a heat treatment unit, a measurement unit and a control unit. The transportation unit transports a substrate-based laminate. The coating unit provides coating liquid on the substrate-based laminate. The heat treatment unit treats the coated substrate-based laminate with heat to form a film. The measurement unit measures the film and provides correction parameters to the coating unit. The control unit controls the transportation unit, the coating unit, the heat treatment unit and the measurement unit.