Patents by Inventor Hsiu-Tsang Lee

Hsiu-Tsang Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Contact type prober automatic alignment
    Patent number: 6316953
    Abstract: Automatic alignment methods for a membrane prober are disclosed. Alignment patterns are designed and manufactured on both a membrane prober and a wafer under test. The patterns are properly designed for acquiring a first set of measurement data that provide relative position information when the prober contacts the wafer. A second set of measurement data can be obtained by a controlled move between the prober and the wafer. The relative position including the translation offset and the rotation angle can be computed by the information derived from the two sets of measurement data. The second set of measurement data may also be acquired by having two alignment pattern pairs that are made to contact in a single touch. More accurate aligrnent can be achieved by using more pairs of alignment patterns.
    Type: Grant
    Filed: July 30, 1999
    Date of Patent: November 13, 2001
    Assignee: Industrial Technology Research Institute
    Inventors: Steven Jyh-Ren Yang, Jane Huei-Chen Chan, Chung-Tao Chang, Hsiu-Tsang Lee
  • Contact type prober automatic alignment
    Patent number: 6049216
    Abstract: Automatic alignment methods for a membrane prober are disclosed. Alignment patterns are designed and manufactured on both a membrane prober and a wafer under test. The patterns are properly designed for acquiring a first set of measurement data that provide relative position information when the prober contacts the wafer. A second set of measurement data can be obtained by a controlled move between the prober and the wafer. The relative position including the translation offset and the rotation angle can be computed by the information derived from the two sets of measurement data. The second set of measurement data may also be acquired by having two alignment pattern pairs that are made to contact in a single touch. More accurate alignment can be achieved by using more pairs of alignment patterns.
    Type: Grant
    Filed: October 27, 1997
    Date of Patent: April 11, 2000
    Assignee: Industrial Technology Research Institute
    Inventors: Steven J. R. Yang, Jane Huei-Chen Chang, Chung-Tao Chang, Hsiu-Tsang Lee