Abstract: Methods and apparatus for a baking chamber for processing a chamber component are provided herein. In some embodiments, a baking chamber includes: an enclosure defining a first chamber, wherein the first chamber comprises: a first chamber body having a first floor and first sidewalls that couple the first floor to a first lid of the first chamber body to define a first interior volume; a first support disposed in the first interior volume; a first gas line disposed in the first interior volume proximate the first lid; a first showerhead disposed between the first gas line and the first support; a first exhaust coupled to the first floor; and a first heater disposed in the first interior volume between the first support and the first floor; and wherein the enclosure includes a door configured to facilitate transferring the chamber component into and out of the enclosure.

Abstract: Certain embodiments provide a method and non-transitory computer readable medium having instructions that, when executed by a processor of a processing system, cause the processing system to perform a method for improving operation of a semiconductor processing system. The method of part life estimation generally includes obtaining a chamber part having a first surface portion and second surface portion. A data matrix in the first portion of the chamber part is read. The data matrix has raised features. The first portion of the chamber part is cleaned. Wear on the raised features is evaluated. The part is discarded in response to the wear on the raised feature.

Abstract: Methods and apparatus for a baking chamber for processing a chamber component are provided herein. In some embodiments, a baking chamber includes: an enclosure defining a first chamber, wherein the first chamber comprises: a first chamber body having a first floor and first sidewalls that couple the first floor to a first lid of the first chamber body to define a first interior volume; a first support disposed in the first interior volume; a first gas line disposed in the first interior volume proximate the first lid; a first showerhead disposed between the first gas line and the first support; a first exhaust coupled to the first floor; and a first heater disposed in the first interior volume between the first support and the first floor; and wherein the enclosure includes a door configured to facilitate transferring the chamber component into and out of the enclosure.

Abstract: Certain embodiments provide a method and non-transitory computer readable medium comprising instructions that, when executed by a processor of a processing system, cause the processing system to perform a method for improving operation of a semiconductor processing system. The method of part life estimation generally includes obtaining a chamber part having a first surface portion and second surface portion. A data matrix in the first portion of the chamber part is read. The data matrix has raised features. The first portion of the chamber part is cleaned. Wear on the raised features is evaluated. The part is discarded in response to the wear on the raised feature.

Abstract: The present disclosure relates to systems and methods for semiconductor tool part tracking and kit verification. Data relating to part identification and performance are encoded to a unique code that is encoded into machine-readable form, such as a data matrix. A multi-dimensional array (MDA) of the data matrices of a group of parts is a ‘golden MDA’. When assembled into a kit, the parts are scanned and compared to the golden MDA. If there's a match, a kit unique code is used to generate a kit data matrix. The part data matrix codes are provided to a database to determine if a part combination will cause a coupling effect, based on part usage history.

Abstract: A tool includes a handle having a chamber for receiving a radio facility and for communicating with radio stations while using or operating the handle. The radio facility includes a radio device having a circuit board disposed within a housing and having a number of electric elements and a volume adjusting knob and one or more buttons and a speaker coupled to the electric elements. One or more batteries may be used to energize the electric elements. An antenna may be electrically coupled to the circuit board, and may be coupled to a driving tool member, for facilitating signal receiving function to the radio device. The housing includes a cover having one or more spring blades for actuating the buttons.

Abstract: A shovel includes a stem having a harder or stronger blade extended from one side, and another or resilient blade extended from the other side. It is preferable that the resilient blade is made of resilient material different from that for the stem, and molded and solidly attached to the stem without assembling processes. The stronger blade includes a number of depressions formed between protuberances to form a serrated or rough structure. The stem includes a rib extended from the other side and engaged into the resilient blade, to solidly attach the resilient blade to the stem. One or more handles may be selectively attached to the stem.

Abstract: A display device includes a plug device having a housing engageable into a hole of an article for sales, the housing includes a chamber and a spring blade having a projection to engage into a depression of the article, and for detachably attaching the housing to the article. A hanger device includes an actuator engageable into the chamber of the housing, to selectively engage with the spring blade of the housing, and to force and retain the projection of the spring blade within the depression of the article, and thus to detachably lock the housing to the article with the actuator of the hanger device. A locking device may be used to lock the actuator of the hanger device to the housing of the plug device.