Patents by Inventor Hsu-Chuan Liu

Hsu-Chuan Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical mechanical polishing particles and slurry and method of producing the same
    Publication number: 20070144075
    Abstract: In a method of producing chemical mechanical polishing particles and slurry, a type of organic nano particles are put in a reaction solution containing nano-scale cerium oxide; the nano-scale cerium oxide is assembled to outer surface of the organic nano particles due to electrostatic attraction among particles, so as to form chemical mechanical polishing particles having a cerium oxide shell. The chemical mechanical polishing particles having a cerium oxide shell are then used to produce chemical mechanical polishing slurry.
    Type: Application
    Filed: December 8, 2006
    Publication date: June 28, 2007
    Applicant: Industrial Technology Research Institute
    Inventors: Kon-Tsu Kin, Shu-Fei Chan, Hsu-Chuan Liu, Ming-Shih Tsai