Patents by Inventor Hsu-Wei Chen

Hsu-Wei Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Detection and charge neutralization device and method thereof
    Patent number: 12022598
    Abstract: A detection and charge neutralization device comprises a vacuum chamber, an electrical optical system, and a charge neutralization member. The electrical optical system and the charge neutralization member are disposed inside the vacuum chamber. The electrical optical system, outputs a charged particle beam to an observation position of the vacuum chamber. The charge neutralization member provides a focused vacuum ultraviolet light to the observation position to neutralize the accumulating charges.
    Type: Grant
    Filed: June 30, 2022
    Date of Patent: June 25, 2024
    Assignee: TAIWAN ELECTRON MICROSCOPE INSTRUMENT CORPORATION
    Inventors: Hsu-Wei Chen, Hsin-Chi Cheng, Tsu-Wei Huang, Ting-Yu Hsieh
  • DETECTION AND CHARGE NEUTRALIZATION DEVICE AND METHOD THEREOF
    Publication number: 20230007762
    Abstract: A detection and charge neutralization device comprises a vacuum chamber, an electrical optical system, and a charge neutralization member. The electrical optical system and the charge neutralization member are disposed inside the vacuum chamber. The electrical optical system, outputs a charged particle beam to an observation position of the vacuum chamber. The charge neutralization member provides a focused vacuum ultraviolet light to the observation position to neutralize the accumulating charges.
    Type: Application
    Filed: June 30, 2022
    Publication date: January 5, 2023
    Inventors: Hsu-Wei Chen, Hsin-Chi Cheng, Tsu-Wei Huang, Ting-Yu Hsieh