Abstract: A method for fabricating a pellicle includes forming a first dielectric layer over a back surface of a substrate. After forming the first dielectric layer, and in some embodiments, a graphene layer is formed over a front surface of the substrate. In some examples, after forming the graphene layer, the first dielectric layer is patterned to form an opening in the first dielectric layer that exposes a portion of the back surface of the substrate. Thereafter, while using the patterned first dielectric layer as a mask, an etching process may be performed to the back surface of the substrate to form a pellicle having a pellicle membrane that includes the graphene layer.

Abstract: A structure including an EUV mask and a pellicle attached to the EUV mask. The pellicle includes a pellicle frame and a plurality of pellicle membrane layers attached to the pellicle frame. The plurality of pellicle membrane layers include at least one core pellicle membrane layer and an additional pellicle membrane layer is disposed on the at least one core pellicle membrane layer. In some embodiments, the additional pellicle membrane layer is a material having a thermal emissivity greater than 0.2, a transmittance greater than 80%, and a refractive index (n) for 13.5 nanometer source of greater than 0.9.

Abstract: A method for fabricating a pellicle includes forming a first dielectric layer over a back surface of a substrate. After forming the first dielectric layer, and in some embodiments, a graphene layer is formed over a front surface of the substrate. In some examples, after forming the graphene layer, the first dielectric layer is patterned to form an opening in the first dielectric layer that exposes a portion of the back surface of the substrate. Thereafter, while using the patterned first dielectric layer as a mask, an etching process may be performed to the back surface of the substrate to form a pellicle having a pellicle membrane that includes the graphene layer.

Abstract: A method for fabricating a pellicle includes forming a first dielectric layer over a back surface of a substrate. After forming the first dielectric layer, and in some embodiments, a graphene layer is formed over a front surface of the substrate. In some examples, after forming the graphene layer, the first dielectric layer is patterned to form an opening in the first dielectric layer that exposes a portion of the back surface of the substrate. Thereafter, while using the patterned first dielectric layer as a mask, an etching process may be performed to the back surface of the substrate to form a pellicle having a pellicle membrane that includes the graphene layer.

Abstract: A structure including an EUV mask and a pellicle attached to the EUV mask. The pellicle includes a pellicle frame and a plurality of pellicle membrane layers attached to the pellicle frame. The plurality of pellicle membrane layers include at least one core pellicle membrane layer and an additional pellicle membrane layer is disposed on the at least one core pellicle membrane layer. In some embodiments, the additional pellicle membrane layer is a material having a thermal emissivity greater than 0.2, a transmittance greater than 80%, and a refractive index (n) for 13.5 nanometer source of greater than 0.9.

Abstract: A structure including an EUV mask and a pellicle attached to the EUV mask. The pellicle includes a pellicle frame and a plurality of pellicle membrane layers attached to the pellicle frame. The plurality of pellicle membrane layers include at least one core pellicle membrane layer and an additional pellicle membrane layer is disposed on the at least one core pellicle membrane layer. In some embodiments, the additional pellicle membrane layer is a material having a thermal emissivity greater than 0.2, a transmittance greater than 80%, and a refractive index (n) for 13.5 nanometer source of greater than 0.9.

Abstract: A method for fabricating a pellicle includes forming a first dielectric layer over a back surface of a substrate. After forming the first dielectric layer, and in some embodiments, a graphene layer is formed over a front surface of the substrate. In some examples, after forming the graphene layer, the first dielectric layer is patterned to form an opening in the first dielectric layer that exposes a portion of the back surface of the substrate. Thereafter, while using the patterned first dielectric layer as a mask, an etching process may be performed to the back surface of the substrate to form a pellicle having a pellicle membrane that includes the graphene layer.

Abstract: A structure including an EUV mask and a pellicle attached to the EUV mask. The pellicle includes a pellicle frame and a plurality of pellicle membrane layers attached to the pellicle frame. The plurality of pellicle membrane layers include at least one core pellicle membrane layer and an additional pellicle membrane layer is disposed on the at least one core pellicle membrane layer. In some embodiments, the additional pellicle membrane layer is a material having a thermal emissivity greater than 0.2, a transmittance greater than 80%, and a refractive index (n) for 13.5 nanometer source of greater than 0.9.

Abstract: An exemplary locking assembly includes a locking member and a sleeve. The locking member includes a locking portion, a neck portion, and a head portion. One end of the neck portion is connected to the head portion, and another end of the neck portion is connected to the locking portion. An outer diameter of the locking portion is larger than that of the neck portion. An outer diameter of the locking portion is larger than that of the neck portion. The sleeve defines a through hole therein for holding and guiding the locking member. The through hole includes a first part. The sleeve further includes a restricting portion extending out from an inner surface of the through hole adjoining the first part of the through hole. After locking portion of the locking member passes through the restricting portion of the sleeve, the restricting portion blocks the locking portion from sliding out of the sleeve.

Abstract: An exemplary locking assembly includes a locking member and a sleeve. The locking member includes a locking portion, a neck portion, and a head portion. One end of the neck portion is connected to the head portion, and another end of the neck portion is connected to the locking portion. An outer diameter of the locking portion is larger than that of the neck portion. An outer diameter of the locking portion is larger than that of the neck portion. The sleeve defines a through hole therein for holding and guiding the locking member. The through hole includes a first part. The sleeve further includes a restricting portion extending out from an inner surface of the through hole adjoining the first part of the through hole. After locking portion of the locking member passes through the restricting portion of the sleeve, the restricting portion blocks the locking portion from sliding out of the sleeve.

Abstract: A mouse device includes a case, a click operating area mounted on the case, a key inputting area mounted on the case, and a key lock moveably attached to the case. The click operating area performs selection and/or scrolling within an active window or graphical user interface. The key inputting area includes a plurality of keys. The key lock is moveable between a first position where the keys are unlocked and a second position where the keys are locked.

Abstract: A hard disk box includes a tray, a cover, and a enclosure. The tray includes a bezel and a bottom plate. The bottom plate includes a locking portion forming a catch. The cover includes a rear wall, and an insert wall extending from a side of the rear wall. A hook extends from the rear wall for engaging the catch of the tray. The enclosure accommodates the bottom plate of the tray and the insert wall of the cover, and is retained between the bezel of the tray and the rear wall of the cover. The enclosure defines an opening in a bottom wall thereof, corresponding to the locking portion of the tray.

Abstract: A mounting apparatus includes a bezel, a first fixing bracket mounted to the bezel for fixing a side of an LCD panel, a second fixing bracket mounted to the bezel, a pair of sliding members slidable with respect to the second fixing bracket for fixing an opposite side of the LCD panel, and a cover mounted to the bezel for enclosing the LCD panel.

Abstract: A latch mechanism includes a latching member, a button, and an elastic member for restoring the latching member. The latching member is rotatably installed in a cover unit. The latching member includes a latching portion for engaging with a base unit. The button is movably fixed to the cover unit. The button includes a slanted pushing portion for driving the latching member to rotate for disengaging the latching portion from the base unit.

Abstract: A display device includes a frame defining an opening, a shell, and a display panel installed between the frame and the shell. The display panel is viewable via the opening of the frame. A latch is formed on the frame. A fixing portion is formed on the shell and slidably engaged with the latch of the frame for slidably fixing the shell to the frame. A plurality of fasteners extends through the frame to engage with the shell to thereby fasten the frame and the shell together.

Abstract: A Liquid Crystal Display (LCD) device includes a bezel, a mounting bracket, a movable bracket, and an LCD panel. The bezel defines an opening. The mounting bracket is mounted to a side of the bezel. The movable bracket is slidably mounted to an opposite side of the bezel and movable with respect to the mounting bracket. The LCD panel is sandwiched between the mounting bracket and the movable bracket and visible via the opening in the bezel. The cover is mounted to the bezel.

Abstract: A mounting apparatus for holding a data storage device that defines a mounting hole in a side wall, includes a bracket for holding the data storage device therein, and an operating member movably attached to the sidewall of the bracket. The bracket includes a sidewall. A tab extends from the sidewall. A locking portion protrudes in from the tab near a free end of the tab for engaging in the mounting hole of the data storage device. The operating member includes a cantilever-shaped resilient driving portion for engaging with the tab to retract the locking portion from the mounting hole of the data storage device.

Abstract: A latch mechanism for fixing a cover unit to a base unit of a foldable electronic device in a closed position is provided. The latch mechanism includes a locking member, an operating member, and at least one resilient member. The base unit includes a pair of recessed portions. The locking member is adapted for be pivotably received in the cover unit. The locking member includes a pair of locking portions for engaging with the corresponding recessed portions of the base unit. The operating member is adapted for be slidably mounted to the cover unit. The operating member includes at least one latch slidable toward the locking member to drive the locking member to pivot. The resilient member is connectable with the operating member and adapted for engage with the cover unit of the foldable electronic device, for urging the operating member away from the locking member.

Abstract: A portable computer includes a chassis, a top panel, a motherboard, and a side cover. The chassis includes a bottom panel and a side panel. The bottom panel forms a pair of restricting tabs. The top panel covers the chassis. The top panel includes a plurality of resilient tabs. The motherboard is received in the chassis. The motherboard forms a plurality of sockets. The side cover is replaceably mounted between the chassis and the top panel, being held by the restricting tabs, the resilient tabs, and side panel. The side cover defines a plurality of slots for receiving the sockets of the motherboard.

Abstract: An exemplary locking assembly includes a locking member and a sleeve. The locking member includes a locking portion and a neck portion connecting the locking portion. An outer diameter of the locking portion is larger than that of the neck portion. The sleeve defines a through hole therein for holding and guiding the locking member. The through hole includes a first part. The sleeve further includes a restricting portion extending out from an inner surface of the through hole adjoining the first part of the through hole. After locking portion of the locking member passes through the restricting portion of the sleeve, the restricting portion blocks the locking portion from sliding out of the sleeve.