Abstract: A cassette exchange system is provided. The cassette exchange system includes a wafer temporary storage apparatus, a first cassette base, a second cassette base and a moving apparatus. The wafer temporary storage apparatus includes a number of wafer carrier units. The first cassette base is suitable for carrying a first cassette, and the second cassette base is suitable for carrying a second cassette. The moving apparatus connects the first cassette base with the second cassette base. Also, the moving apparatus sequentially moves the first cassette base and the second cassette base to the wafer temporary storage apparatus to simultaneously transfer the wafers stored in the first cassette to the second cassette.

Abstract: A cassette exchange system is provided. The cassette exchange system includes a wafer temporary storage apparatus, a first cassette base, a second cassette base and a moving apparatus. The wafer temporary storage apparatus includes a plurality of wafer carrier units. The first cassette base is suitable for carrying a first cassette, and the second cassette base is suitable for carrying a second cassette. The moving apparatus connects the first cassette base with the second cassette base. Also, the moving apparatus sequentially moves the first cassette base and the second cassette base to the wafer temporary storage apparatus to simultaneously transfer the wafers stored in the first cassette to the second cassette.

Abstract: A communication monitoring method and apparatus of semiconductor devices for receiving messages transmitted between a host and an equipment. The method includes receiving a message, recording the message, determining if the message is a control character EOT, setting a flag to be true if the message is the control character EOT, recording and displaying the message if the message is another control character, determining the next message to be a data message if the flag is true, and determining if other data messages are completely received according to the length of the data messages.

Abstract: The present invention provides a Mitsubishi SEMI Equipment Communication (MSEC)/SEMI Equipment Communication Standard (SECS) protocol converter and conversion method thereof. The MSEC/SECS protocol converter and conversion method utilize an MSEC transceiver to transmit and receive MSEC signals, an SECS transceiver to transmit and receive SECS signals, an MSEC/SECS module to transform MSEC signals into SECS signals, an SECS/MSEC module to transform SECS signals into MSEC signals, and a control character transmission module to transmit control characters. With the MSEC/SECS protocol converter and conversion method, the computer host only needs the SECS interface to communicate the semiconductor apparatus with different protocols, which reduces the complexity and processing requirements of the computer host.