Patents by Inventor Hsuan-Hung Wu

Hsuan-Hung Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11508596
    Abstract: Apparatus and methods for automatically handling die carriers are disclosed. In one example, a disclosed apparatus includes: at least one load port each configured for loading a die carrier operable to hold a plurality of dies; and an interface tool coupled to the at least one load port and a semiconductor processing unit. The interface tool comprises: a first robotic arm configured for transporting the die carrier from the at least one load port to the interface tool, and a second robotic arm configured for transporting the die carrier from the interface tool to the semiconductor processing unit for processing at least one die in the die carrier.
    Type: Grant
    Filed: May 28, 2020
    Date of Patent: November 22, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tsung-Sheng Kuo, Cheng-Lung Wu, Chih-Hung Huang, Yang-Ann Chu, Hsuan Lee, Jiun-Rong Pai
  • Patent number: 11495471
    Abstract: A semiconductor substrate has an exposed surface having a compositionally uniform metal, and an embedded surface having the metal and an oxide. The exposed surface is polished using a first slurry including a first abrasive and a first amine-based alkaline until the embedded surface is exposed. The embedded surface is polished using a second slurry including a second abrasive and a second amine-based alkaline. The second abrasive is different from the first abrasive. The second amine-based alkaline is different from the first amine-based alkaline. The metal and the oxide each has a first and a second removal rate in the first slurry, respectively, and a third and fourth removal rate in the second slurry, respectively. A ratio of the first removal rate to the second removal rate is greater than 30:1, and a ratio of the third removal rate to the fourth removal rate is about 1:0.5 to about 1:2.
    Type: Grant
    Filed: August 12, 2020
    Date of Patent: November 8, 2022
    Inventors: An-Hsuan Lee, Chun-Hung Liao, Chen-Hao Wu, Shen-Nan Lee, Teng-Chun Tsai, Huang-Lin Chao
  • Patent number: 11480869
    Abstract: A photomask includes a substrate, a multilayer stack disposed over the substrate and configured to reflect a radiation, a capping layer over the multilayer stack, and an anti-reflective layer over the capping layer. The anti-reflective layer comprises a first pattern, wherein the first pattern exposes the capping layer and is configured as a printable feature. The photomask also includes an absorber spaced apart from the printable feature from a top-view perspective.
    Type: Grant
    Filed: April 15, 2020
    Date of Patent: October 25, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chien-Hung Lai, Hao-Ming Chang, Chia-Shih Lin, Hsuan-Wen Wang, Yu-Hsin Hsu, Chih-Tsung Shih, Yu-Hsun Wu
  • Publication number: 20220223448
    Abstract: A multiple transport carrier docking device may be capable of storing and/or staging a plurality of transport carriers in a chamber of the multiple transport carrier docking device, and may be capable of forming an air-tight seal around a transport carrier in the chamber. Semiconductor wafers in the transport carrier may be accessed by a wafer transport tool while the air-tight seal around the transport carrier prevents and/or reduces the likelihood that contaminants in the semiconductor fabrication facility will reach the semiconductor wafers. The air-tight seal around the transport carrier may reduce defects of the semiconductor wafers that might otherwise be caused by the contaminants, may increase manufacturing yield and quality in the semiconductor fabrication facility, and/or may permit the continued reduction in device and/or feature sizes of integrated circuits and/or semiconductor devices that are to be formed on semiconductor wafers.
    Type: Application
    Filed: April 4, 2022
    Publication date: July 14, 2022
    Inventors: Chih-Hung HUANG, Cheng-Lung WU, Yang-Ann CHU, Hsuan LEE, Jiun-Rong PAI
  • Publication number: 20220223449
    Abstract: A transport carrier docking device may be capable of forming an air-tight seal around a transport carrier while a front portion of the transport carrier is inserted into a chamber of the transport carrier docking device. Semiconductor wafers in the transport carrier may be accessed by a transport tool while the air-tight seal exists around the transport carrier, which prevents and/or reduces the likelihood that contaminants in a semiconductor fabrication facility will reach the semiconductor wafers. The air-tight seal around the transport carrier may reduce defects of the semiconductor wafers that might otherwise be caused by the contaminants, may increase manufacturing yield and quality in the semiconductor fabrication facility, and/or may permit the continued reduction in device and/or feature sizes of integrated circuits and/or semiconductor devices that are to be formed on semiconductor wafers.
    Type: Application
    Filed: March 31, 2022
    Publication date: July 14, 2022
    Inventors: Chih-Hung HUANG, Cheng-Lung WU, Yang-Ann CHU, Hsuan LEE, Jiun-Rong PAI
  • Patent number: 9008506
    Abstract: A fiber network events measurement apparatus has a laser module alternately generating a pulse signal detecting beam and an FMCW detecting beam. The beams are sent to the fiber network route through a directional coupler. A photo detector receives feedback energy of the beams transmitting in the fiber network route and converts the feedback energy into electronic signals. A mixer uses a frequency difference calculation to obtain a comparison result according to an original and a reflected FMCW signal. The electronic signal is converted into a digital signal by an A/D converter. A signal control unit then obtains a compound trace result including information of characteristic trace and event positions. The compound trace result shows a fiber characteristic trace and event position trace for measuring the fiber network routes.
    Type: Grant
    Filed: February 6, 2013
    Date of Patent: April 14, 2015
    Assignee: Polarlink Technologies, Ltd.
    Inventors: Ching-Wen Hsiao, Hsuan-Hung Wu, Shih-Tien Lin, Fu-Chun Hung, Yu-Shu Chen, Ching-Lin Wu, Chun-Hung Su
  • Patent number: 8837937
    Abstract: A detecting device that detects insertion loss of fiber route and return loss of individual events in an optical fiber network based on signals from dual paths to obtain various kinds of reference information of the optical fiber network. When the first path is selected, a detection signal produced using frequency modulated continuous wave (FMCW) technique is output to the optical fiber network. A return signal of the detection signal is used to analyze the position and return loss of various events in the optical fiber network. When the second path is selected, a common detection light is output to the optical fiber network. Based on the return signal of the common detection light, the insertion loss and total return loss of the entire network are obtained.
    Type: Grant
    Filed: January 8, 2013
    Date of Patent: September 16, 2014
    Assignee: Polarlink Technologies, Ltd.
    Inventors: Ching-Wen Hsiao, Hsuan-Hung Wu, Shih-Tien Lin, Fu-Chun Hung, Yu-Shu Chen, Ching-Lin Wu, Chun-Hung Su
  • Publication number: 20130322871
    Abstract: A fiber network events measurement apparatus has a laser module alternately generating a pulse signal detecting beam and an FMCW detecting beam. The beams are sent to the fiber network route through a directional coupler. A photo detector receives feedback energy of the beams transmitting in the fiber network route and converts the feedback energy into electronic signals. A mixer uses a frequency difference calculation to obtain a comparison result according to an original and a reflected FMCW signal. The electronic signal is converted into a digital signal by an A/D converter. A signal control unit then obtains a compound trace result including information of characteristic trace and event positions. The compound trace result shows a fiber characteristic trace and event position trace for measuring the fiber network routes.
    Type: Application
    Filed: February 6, 2013
    Publication date: December 5, 2013
    Applicant: POLARLINK TECHNOLOGIES, LTD.
    Inventors: Ching-Wen HSIAO, Hsuan-Hung WU, Shih-Tien LIN, Fu-Chun HUNG, Yu-Shu CHEN, Ching-Lin WU, Chun-Hung SU
  • Publication number: 20130322874
    Abstract: A detecting device that detects insertion loss of fiber route and return loss of individual events in an optical fiber network based on signals from dual paths to obtain various kinds of reference information of the optical fiber network. When the first path is selected, a detection signal produced using frequency modulated continuous wave (FMCW) technique is output to the optical fiber network. A return signal of the detection signal is used to analyze the position and return loss of various events in the optical fiber network. When the second path is selected, a common detection light is output to the optical fiber network. Based on the return signal of the common detection light, the insertion loss and total return loss of the entire network are obtained.
    Type: Application
    Filed: January 8, 2013
    Publication date: December 5, 2013
    Applicant: Polarlink Technologies, Ltd.
    Inventors: Ching-Wen Hsiao, Hsuan-Hung Wu, Shih-Tien Lin, Fu-Chun Hung, Yu-Shu Chen, Ching-Lin Wu, Chun-Hung Su
  • Patent number: 7903968
    Abstract: An optical network transmission channel failover switching device is proposed, which is designed for use in conjunction with an optical network for providing a transmission channel failover switching function, which is characterized by the provision of a two-to-two (2×2) type of optical switch, a one-to-two (1×2) type of optical switch, and a monitoring beam generating module for providing a backup channel monitoring function that can be used to activate the switching action. This feature allows the utilization of the optical network system to have enhanced reliability, serviceability, and security.
    Type: Grant
    Filed: August 22, 2007
    Date of Patent: March 8, 2011
    Assignee: Inventec Multimedia & Telecom Corporation
    Inventors: Fu-Chun Hung, Hsuan-Hung Wu
  • Patent number: 7787764
    Abstract: An optical network transmission channel failover switching device is proposed, which is designed for use in conjunction with an optical network for providing a transmission channel failover switching function, which is characterized by the provision of a pair of two-to-two (2×2) optical switches and an optical transceiver module for providing a backup channel monitoring function that can be used to activate the failover switching action. This feature allows the utilization of the optical network system to have enhanced reliability, serviceability, and security.
    Type: Grant
    Filed: May 14, 2007
    Date of Patent: August 31, 2010
    Assignee: Inventec Multimedia & Telecom Corporation
    Inventors: Fu-Chun Hung, Hsuan-Hung Wu
  • Publication number: 20080152341
    Abstract: An optical network transmission channel failover switching device is proposed, which is designed for use with an optical network for providing the optical network with a transmission channel failover switching function, and which is characterized by the provision of a pair of one-to-two (1×2) type of optical switch and a monitoring beam generating module for providing a backup channel monitoring function that can be used to activate the switching action. This feature allows the utilization of the optical network system to have enhanced reliability, serviceability, and security.
    Type: Application
    Filed: May 14, 2007
    Publication date: June 26, 2008
    Applicant: INVENTEC MULTIMEDIA & TELECOM CORPORATION
    Inventors: Fu-Chun Hung, Hsuan-Hung Wu
  • Publication number: 20080152340
    Abstract: An optical network transmission channel failover switching device is proposed, which is designed for use in conjunction with an optical network for providing a transmission channel failover switching function, which is characterized by the provision of a pair of two-to-two (2×2) optical switches and an optical transceiver module for providing a backup channel monitoring function that can be used to activate the failover switching action. This feature allows the utilization of the optical network system to have enhanced reliability, serviceability, and security.
    Type: Application
    Filed: May 14, 2007
    Publication date: June 26, 2008
    Applicant: INVENTEC MULTIMEDIA & TELECOM CORPORATION
    Inventors: Fu-Chun Hung, Hsuan-Hung Wu
  • Publication number: 20080152342
    Abstract: An optical network transmission channel failover switching device is proposed, which is designed for use in conjunction with an optical network for providing a transmission channel failover switching function, which is characterized by the provision of a two-to-two (2×2) type of optical switch, a one-to-two (1×2) type of optical switch, and a monitoring beam generating module for providing a backup channel monitoring function that can be used to activate the switching action. This feature allows the utilization of the optical network system to have enhanced reliability, serviceability, and security.
    Type: Application
    Filed: August 22, 2007
    Publication date: June 26, 2008
    Applicant: INVENTEC MULTIMEDIA & TELECOM CORPORATION
    Inventors: Fu-Chun Hung, Hsuan-Hung Wu
  • Publication number: 20080145048
    Abstract: The present invention provides an optical fiber monitoring system and method incorporated with an automatic fault protection mechanism. The optical fiber monitoring system includes a primary optical channel, a secondary optical channel, an optical channel fault examination device, a plurality of automatic fault protection devices, and a plurality of optical terminal equipments. When an automatic fault protection device detects a fault, it switches the connection of the optical terminal equipments from the primary optical channel to the secondary optical channel; meanwhile, a test optical channel is selected to be checked by the optical channel fault examination device.
    Type: Application
    Filed: December 19, 2006
    Publication date: June 19, 2008
    Inventors: Hsuan-Hung Wu, Teng-Yuan Chi, Tien-Hsiang Lu, Wen-Ling Liao
  • Patent number: 6965735
    Abstract: A method and an apparatus for switching channel connection between multiple optical channels synchronously and automatically. The apparatus employs an optical switch to interface among a plurality of optical channels, and an optical power meter to monitor data transmission over the plurality of optical channels by measuring the optical power level of optical signals over the channel. When signal transmission is detected over a specific optical channel, the optical switch is locked to the specific optical channel allowing data signals over the specific optical channel to be transmitted to a specific device or another optical channel through the optical switch. When no optical signal is detected over the channel, said optical switch will be switched to another optical channel, such that signal monitoring and switching channels among a plurality of optical channels is able to be performed synchronously and automatically.
    Type: Grant
    Filed: November 8, 2001
    Date of Patent: November 15, 2005
    Assignee: Technology Thesaurus Corp.
    Inventors: Ting-Feng Wu, Hsuan-Hung Wu, Wen-Pin Yang, Teng-Yuan Chi
  • Publication number: 20030035175
    Abstract: A method and an apparatus for switching channel connection between multiple optical channels synchronously and automatically. The apparatus employs an optical switch to interface among a plurality of optical channels, and an optical power meter to monitor data transmission over the plurality of optical channels by measuring the optical power level of optical signals over the channel. When signal transmission is detected over a specific optical channel, the optical switch is locked to the specific optical channel allowing data signals over the specific optical channel to be transmitted to a specific device or another optical channel through the optical switch. When no optical signal is detected over the channel, said optical switch will be switched to another optical channel, such that signal monitoring and switching channels among a plurality of optical channels is able to be performed synchronously and automatically.
    Type: Application
    Filed: November 8, 2001
    Publication date: February 20, 2003
    Inventors: Ting-Feng Wu, Hsuan-Hung Wu, Wen-Pin Yang, Teng-Yuan Chi