Patents by Inventor Hsuang-Sheng Tung

Hsuang-Sheng Tung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wet cleaning device
    Publication number: 20030201001
    Abstract: A wet cleaning device for chemically cleaning a plurality of wafers. The wet cleaning device includes a plurality of first chemical cleaning tanks for conducting a first cleaning procedure, a plurality of second chemical cleaning tanks for conducting a second cleaning procedure, a transferring tank including a first measuring device for measuring the wafers after the first cleaning procedure, a measuring tank including a second measuring device for measuring the wafers after the second cleaning procedure, a first transporting device, and a second transporting device.
    Type: Application
    Filed: October 25, 2002
    Publication date: October 30, 2003
    Inventors: Hsin-Ta Chien, Hsuang-Sheng Tung, Ching-Yuan Chen