Abstract: A method includes: generating a designed mask overlay mark associated with an actual mask overlay mark to be formed in a mask; forming the actual mask overlay mark in the mask based on the designed mask overlay mark, the actual mask overlay mark including a plurality of overlay patterns; forming a device feature pattern adjacent to the actual mask overlay mark; forming an alignment of the mask by a mask metrology apparatus including a light source having a wavelength and a numerical aperture, wherein a pitch between adjacent two of the plurality of overlay patterns does not exceed the wavelength divided by twice the numerical aperture; and forming a pattern in a layer of a wafer by transferring the device feature pattern while the mask is under the alignment.

Abstract: A touch device includes a touch panel, a sensing unit, and an operation unit is provided. The sensing unit is coupled to the touch panel, for scanning a scan area of the touch panel to output a touch signal. The operation unit is coupled to the sensing unit, for determining the scan area according to the touch signal. When the touch signal corresponds to a first close path, the operation unit defines a close area formed by the first close path as the first sub touch area. When the first sub touch area is undefined, the operation unit chooses a whole touch area of the touch panel as the scan area. When the first sub touch area is defined, the operation chooses the first sub touch area as the scan area.

Abstract: A touch input device includes a substrate, plural sensible conductive layers and plural first switch units. The substrate is provided with an upper surface, the sensible conductive layers are all configured on the upper surface and are arranged in columns and rows. The first switch units are configured on the substrate and are electrically connected with the sensible conductive layers. By the first switch units, same columns of the sensible conductive layers can conduct electrically with one another and same rows of the sensible conductive layers can conduct electrically with one another.

Abstract: A sensor structure of a touch panel and a method of determining a touch signal generated by the same are disclosed. The sensor structure includes a plurality of sensor lines disposed on a surface of a substrate, and a control circuit electrically connected to the sensor lines. Each of the sensor lines has a plurality of conductive pads and a conductive line electrically connected the conductive pads. The control circuit receives a touch signal from one of the sensor lines. The touch signal is resulting from a touch capacitance generated between a touch and one of the conductive pads of the sensor line. The control circuit calculates the position of the touch based on the touch capacitance. In addition, the touch capacitance generated by a conductive pad close to the control circuit is larger than the touch capacitance generated by another conductive pad further away from the control circuit.

Abstract: A sensor structure of a touch panel and a method of determining a touch signal generated by the same are disclosed. The sensor structure includes a plurality of sensor lines disposed on a surface of a substrate, and a control circuit electrically connected to the sensor lines. Each of the sensor lines has a plurality of conductive pads and a conductive line electrically connected the conductive pads. The control circuit receives a touch signal from one of the sensor lines. The touch signal is resulting from a touch capacitance generated between a touch and one of the conductive pads of the sensor line. The control circuit calculates the position of the touch based on the touch capacitance. In addition, the touch capacitance generated by a conductive pad close to the control circuit is larger than the touch capacitance generated by another conductive pad further away from the control circuit.

Abstract: A sensor structure of a touch panel and a method of determining a touch signal generated by the same are disclosed. The sensor structure includes a plurality of sensor lines disposed on a surface of a substrate, and a control circuit electrically connected to the sensor lines. Each of the sensor lines has a plurality of conductive pads and a conductive line electrically connected the conductive pads. The control circuit receives a touch signal from one of the sensor lines. The touch signal is resulting from a touch capacitance generated between a touch and one of the conductive pads of the sensor line. The control circuit calculates the position of the touch based on the touch capacitance. In addition, the touch capacitance generated by a conductive pad close to the control circuit is larger than the touch capacitance generated by another conductive pad further away from the control circuit.

Abstract: A method of positioning a coordinate suitable for a touch panel includes following steps. When a touch event occurs, the touch panel generates a corresponding detection coordinate periodically until the touch event ends. When the touch event occurs, the detection coordinate generated by the touch panel is sequentially stored. The touch event is ignored until the number of coordinates generated by the touch panel is greater than or equal to N, and N is a positive integer. When the number of coordinates generated by the touch panel is greater than or equal to N, a touch coordinate corresponding to the touch event is generated according to the last generated N detection coordinates. The above-mentioned step of generating the touch coordinate is repeated according to a cycle of generating the detection coordinate by the touch panel so as to renew the touch coordinate until the touch event ends.

Abstract: A touch device includes a touch panel, a sensing unit, and an operation unit is provided. The sensing unit is coupled to the touch panel, for scanning a scan area of the touch panel to output a touch signal. The operation unit is coupled to the sensing unit, for determining the scan area according to the touch signal. When the touch signal corresponds to a first close path, the operation unit defines a close area formed by the first close path as the first sub touch area. When the first sub touch area is undefined, the operation unit chooses a whole touch area of the touch panel as the scan area. When the first sub touch area is defined, the operation chooses the first sub touch area as the scan area.

Abstract: A touch input device includes a substrate, plural sensible conductive layers and plural first switch units. The substrate is provided with an upper surface, the sensible conductive layers are all configured on the upper surface and are arranged in columns and rows. The first switch units are configured on the substrate and are electrically connected with the sensible conductive layers. By the first switch units, same columns of the sensible conductive layers can conduct electrically with one another and same rows of the sensible conductive layers can conduct electrically with one another.

Abstract: A method of scanning a touch panel is provided. The present method includes following steps. First, a scan area is defined according to the coordinates of a detected touch signal. Next, the scan area is scanned during a predetermined period to detect a next touch panel. After the predetermined period, a sensing range of the touch panel is scanned to re-define the scan area. Because the scan area is smaller than the sensing range of the touch panel, the time and power consumed by the scanning operation can be both reduced by detecting the touch signals within the scan area.

Abstract: A method of positioning a coordinate suitable for a touch panel includes following steps. When a touch event occurs, the touch panel generates a corresponding detection coordinate periodically until the touch event ends. When the touch event occurs, the detection coordinate generated by the touch panel is sequentially stored. The touch event is ignored until the number of coordinates generated by the touch panel is greater than or equal to N, and N is a positive integer. When the number of coordinates generated by the touch panel is greater than or equal to N, a touch coordinate corresponding to the touch event is generated according to the last generated N detection coordinates. The above-mentioned step of generating the touch coordinate is repeated according to a cycle of generating the detection coordinate by the touch panel so as to renew the touch coordinate until the touch event ends.

Abstract: A sensor structure of a touch panel and a method of determining a touch signal generated by the same are disclosed. The sensor structure includes a plurality of sensor lines disposed on a surface of a substrate, and a control circuit electrically connected to the sensor lines. Each of the sensor lines has a plurality of conductive pads and a conductive line electrically connected the conductive pads. The control circuit receives a touch signal from one of the sensor lines. The touch signal is resulting from a touch capacitance generated between a touch and one of the conductive pads of the sensor line. The control circuit calculates the position of the touch based on the touch capacitance. In addition, the touch capacitance generated by a conductive pad close to the control circuit is larger than the touch capacitance generated by another conductive pad further away from the control circuit.