Abstract: A method includes receiving a device design layout and a scribe line design layout surrounding the device design layout. The device design layout and the scribe line design layout are rotated in different directions. An optical proximity correction (OPC) process is performed on the rotated device design layout and the rotated scribe line design layout. A reticle includes the device design layout and the scribe line design layout is formed after performing the OPC process.

Abstract: A variable value monitoring system and method acquires and displays data information words having addresses within a certain range. In one mode of operation, data information words having addresses within a predetermined range are selected and stored in a shadow RAM and only changes in that data are presented to a viewer. The viewer can select the display format for a panel of data contained within the predetermined range of addresses. A FIFO memory temporarily stores the variable values of selected data information words. A flag memory stores flag bits at internal addresses corresponding to each address in a predetermined block of external addresses. Status bit are provided for each data word addressed by the predetermined block of addresses and means are provided for logically comparing the flag bits with corresponding status bits and for storing a data information word in the FIFO if the logical comparison is true.