Patents by Inventor Hsueh-Yao Ching

Hsueh-Yao Ching has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer assessment apparatus for a single wafer machine and method thereof
    Publication number: 20040225399
    Abstract: A wafer assessment apparatus and method for a single wafer machine. The wafer assessment apparatus includes a pedestal, a movable supporting device, a weight measurement device, a signal transmission device and a control unit. The movable supporting device is disposed in the pedestal to support a wafer. The weight measurement device is disposed on the movable supporting device to measure the weight of the wafer. The signal transmission device is electrically connected to the weight measurement device to output a wafer weight signal. The control unit is electrically connected to the signal transmission device to receive and process the wafer weight signal to determine if the wafer is positioned correctly and/or damaged.
    Type: Application
    Filed: April 28, 2003
    Publication date: November 11, 2004
    Inventors: Kuo-Lang Chen, Hsueh-Yao Ching