Abstract: A method includes removing a dummy gate stack to form a trench between gate spacers, depositing a gate dielectric extending into the trench, and performing a first treatment process on the gate dielectric. The first treatment process is performed using a fluorine-containing gas. A first drive-in process is then performed to drive fluorine in the fluorine-containing gas into the gate dielectric. The method further includes performing a second treatment process on the gate dielectric, wherein the second treatment process is performed using the fluorine-containing gas, and performing a second drive-in process to drive fluorine in the fluorine-containing gas into the gate dielectric. After the second drive-in process, conductive layers are formed to fill the trench.

Abstract: A microphone system is disclosed, comprising: a microphone array and a processing unit. The microphone array comprises Q microphones that detect sound and generate Q audio signals. The processing unit is configured to perform operations comprising: spatial filtering over the Q audio signals using a trained model based on at least one target beam area (TBA) and coordinates of the Q microphones to generate a beamformed output signal originated from ? target sound source inside the at least one TBA, where ?>=0. Each TBA is defined by r time delay ranges for r combinations of two microphones out of the Q microphones, where Q>=3 and r>=1. A dimension of a first number for locations of all sound sources able to be distinguished by the processing unit increases as a dimension of a second number for a geometry formed by the Q microphones increases.

Abstract: A microphone system of the invention is applicable to an electronic device comprising an adjustable mechanism that causes a change in geometry of a microphone array. The microphone system comprises the microphone array, a sensor and a beamformer. The microphone array comprises multiple microphones that detect sound and generate multiple audio signals. The sensor detects a mechanism variation of the electronic device to generate a sensing output. The beamformer is configured to perform a set of operations comprising: performing a spatial filtering operation over the multiple audio signals using a trained model based on the sensing output, one or more first sound sources in one or more desired directions and one or more second sound sources in one or more undesired directions to generate a beamformed output signal originated from the one or more first sound sources.