Patents by Inventor Hsun-Po WEN

Hsun-Po WEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion implant apparatus and method of controlling the ion implant apparatus
    Patent number: 11462382
    Abstract: The present disclosure provides a substrate-processing apparatus. The substrate-processing apparatus includes an ion implanter and a controller associated with the ion implanter. The ion implanter is configured to implant ions into a substrate using an ion beam. The controller is configured to monitor an initial implantation profile of the ion beam and tune the ion implanter to provide the ion beam having a desired implantation profile based on the initial implantation profile and the desired implantation profile.
    Type: Grant
    Filed: February 25, 2021
    Date of Patent: October 4, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Hsun-Po Wen, Sung-Hui Chen
  • ION IMPLANT APPARATUS AND METHOD OF CONTROLLING THE ION IMPLANT APPARATUS
    Publication number: 20220270846
    Abstract: The present disclosure provides a substrate-processing apparatus. The substrate-processing apparatus includes an ion implanter and a controller associated with the ion implanter. The ion implanter is configured to implant ions into a substrate using an ion beam. The controller is configured to monitor an initial implantation profile of the ion beam and tune the ion implanter to provide the ion beam having a desired implantation profile based on the initial implantation profile and the desired implantation profile.
    Type: Application
    Filed: February 25, 2021
    Publication date: August 25, 2022
    Inventors: Hsun-Po WEN, Sung-Hui CHEN