Patents by Inventor Hu-Won Seo

Hu-Won Seo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer guide in wafer cleaning apparatus
    Publication number: 20070125726
    Abstract: A wafer guide in a wafer cleaning apparatus comprises of a lower panel portion. The wafer guide also comprises of a plurality of wafer supporting panel portions, the plurality of wafer supporting panel portions being configured to protrude from at least one side of the lower panel portion and support a wafer. The wafer guide also comprises of a plurality of slot portions, the plurality of slot portions being configured to form at upper ends of the plurality of wafer supporting panel portions and hold the wafer by forming contact with at least a portion of a wafer edge area without forming contact with a wafer cell area.
    Type: Application
    Filed: September 19, 2006
    Publication date: June 7, 2007
    Inventor: Hu-Won Seo