Patents by Inventor Hua Chung

Hua Chung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11959167
    Abstract: Embodiments of the invention provide processes to selectively form a cobalt layer on a copper surface over exposed dielectric surfaces. In one embodiment, a method for capping a copper surface on a substrate is provided which includes positioning a substrate within a processing chamber, wherein the substrate contains a contaminated copper surface and a dielectric surface, exposing the contaminated copper surface to a reducing agent while forming a copper surface during a pre-treatment process, exposing the substrate to a cobalt precursor gas to selectively form a cobalt capping layer over the copper surface while leaving exposed the dielectric surface during a vapor deposition process, and depositing a dielectric barrier layer over the cobalt capping layer and the dielectric surface.
    Type: Grant
    Filed: June 7, 2022
    Date of Patent: April 16, 2024
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Sang-Ho Yu, Kevin Moraes, Seshadri Ganguli, Hua Chung, See-Eng Phan
  • Patent number: 11946135
    Abstract: Processing methods for forming iridium-containing films at low temperatures are described. The methods comprise exposing a substrate to iridium hexafluoride and a reactant to form iridium metal or iridium silicide films. Methods for enhancing selectivity and tuning the silicon content of some films are also described.
    Type: Grant
    Filed: March 27, 2023
    Date of Patent: April 2, 2024
    Assignee: Applied Materials, Inc.
    Inventors: Feng Q. Liu, Hua Chung, Schubert Chu, Mei Chang, Jeffrey W. Anthis, David Thompson
  • Publication number: 20240096847
    Abstract: A method includes putting a first package component into contact with a second package component. The first package component comprises a first dielectric layer including a first dielectric material, and the first dielectric material is a silicon-oxide-based dielectric material. The second package component includes a second dielectric layer including a second dielectric material different from the first dielectric material. The second dielectric material comprises silicon and an element selected from the group consisting of carbon, nitrogen, and combinations thereof. An annealing process is performed to bond the first dielectric layer to the second dielectric layer.
    Type: Application
    Filed: November 28, 2023
    Publication date: March 21, 2024
    Inventors: Chen-Hua Yu, Wen-Chih Chiou, Ku-Feng Yang, Ming-Tsu Chung
  • Patent number: 11923425
    Abstract: A method for manufacturing a device may include providing an ultra-high voltage (UHV) component that includes a source region and a drain region, and forming an oxide layer on a top surface of the UHV component. The method may include connecting a low voltage terminal to the source region of the UHV component, and connecting a high voltage terminal to the drain region of the UHV component. The method may include forming a shielding structure on a surface of the oxide layer provided above the drain region of the UHV component, forming a high voltage interconnection that connects to the shielding structure and to the high voltage terminal, and forming a metal routing that connects the shielding structure and the low voltage terminal.
    Type: Grant
    Filed: February 17, 2023
    Date of Patent: March 5, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Cheng Chiu, Tian Sheng Lin, Hung-Chou Lin, Yi-Min Chen, Chiu-Hua Chung
  • Publication number: 20240071963
    Abstract: A semiconductor device assembly is provided. The assembly includes a package substrate which has a tunneled interconnect structure. The tunneled interconnect structure has a solder-wettable surface, an interior cavity, and at least one microvia extending from the surface to the cavity. The assembly further includes a semiconductor device disposed over the substrate and a solder joint coupling the device and the substrate. The joint comprises the solder between the semiconductor device and the interconnect structure, which includes the solder on the surface, the solder in the microvia, and the solder within the interior cavity.
    Type: Application
    Filed: August 23, 2022
    Publication date: February 29, 2024
    Inventors: Yun Ting Hsu, Chong Leong Gan, Min Hua Chung, Yung Sheng Zou
  • Publication number: 20230343691
    Abstract: An electronic package is provided, in which an electronic structure is embedded in an encapsulation layer, a protective layer is formed on the encapsulation layer, an insulating layer is formed on the protective layer, and at least one blind via is formed penetrating through the insulating layer and the protective layer, so that the electronic structure is exposed from the blind via to make a circuit layer formed on the insulating layer extending into the blind via to electrically connect the electronic structure. Therefore, by the double layer design of the insulating layer and the protective layer, voids generated by the process are free from being transferred to the insulating layer to avoid the voids remaining in the circuit layer.
    Type: Application
    Filed: June 29, 2022
    Publication date: October 26, 2023
    Applicant: SILICONWARE PRECISION INDUSTRIES CO., LTD.
    Inventors: Sung-Hua Chung, Liang-Pin Chen
  • Publication number: 20230343816
    Abstract: A capacitor structure for a power semiconductor device includes a semiconductor substrate, an isolation insulating layer having a ring-shape and including an outer periphery and an inner periphery defining an opening region, a first electrode disposed on the isolation insulating layer, a dielectric layer disposed on the first electrode, and a second electrode disposed on the dielectric layer.
    Type: Application
    Filed: June 28, 2023
    Publication date: October 26, 2023
    Inventors: Hong-Yang CHEN, Tian Sheng Lin, Yi-Cheng Chiu, Hung-Chou Lin, Yi-Min Chen, Kuo-Ming Wu, Chiu-Hua Chung
  • Publication number: 20230330378
    Abstract: A system and method for managing a respiratory condition of a user is disclosed. The system includes an oxygen concentrator having a compression system configured to generate oxygen enriched air for delivery to the user. A physiological sensor is configured to collect physiological data of the user. The physiological data is of one or more data types. An operational sensor is configured to collect operational data of the oxygen concentrator during operation of the oxygen concentrator. The operational data is of one or more data types. A processor is configured to receive the collected physiological data and the operational data and compute a summary parameter for values of each data type. The processor is also configured to compute a health score from the summary parameter values.
    Type: Application
    Filed: June 25, 2021
    Publication date: October 19, 2023
    Inventors: Alexia Judith Claudine PERES, Hwee Seng CHUA, Kyi Thu MAUNG, Kean Wah LOW, Tirza SUMITRO, Wai Loon OOI, Khian Boon LIM, Teck Wei (Chen Diwei) TAN, Hua Chung HO, Jason TJIA, Shin Chin LEE, Yu Fan LOH
  • Patent number: 11791181
    Abstract: Systems and methods for thermal treatment of a workpiece are provided. In one example, a method for conducting a treatment process on a workpiece, such as a thermal treatment process, an annealing treatment process, an oxidizing treatment process, or a reducing treatment process in a processing apparatus is provided. The processing apparatus includes a plasma chamber and a processing chamber. The plasma chamber and the processing chamber are separated by a plurality of separation grids or grid plates. The separation grids or grid plates operable to filter ions generated in the plasma chamber. The processing chamber has a workpiece support operable to support a workpiece.
    Type: Grant
    Filed: September 18, 2020
    Date of Patent: October 17, 2023
    Assignees: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD, MATTSON TECHNOLOGY, INC.
    Inventors: Ting Xie, Hua Chung, Haochen Li, Xinliang Lu, Shawming Ma, Haichun Yang, Michael X. Yang
  • Patent number: 11791166
    Abstract: Systems and methods for etching titanium containing layers on a workpiece are provided. In one example, a method includes placing the workpiece on a workpiece support in a processing chamber. The workpiece includes a first layer and a second layer. The first layer is a titanium containing layer. The method includes admitting a process gas into the processing chamber. The process gas includes an ozone gas and a fluorine containing gas. The method includes exposing the first layer and the second layer on the workpiece to the process gas to at least partially etch the first layer at a greater etch rate relative to the second layer.
    Type: Grant
    Filed: November 22, 2021
    Date of Patent: October 17, 2023
    Assignees: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD, MATTSON TECHNOLOGY, INC.
    Inventors: Qi Zhang, Haichun Yang, Hua Chung, Ting Xie, Michael X. Yang
  • Publication number: 20230324787
    Abstract: A photomask assembly may be formed such that stress relief trenches are formed in a pellicle frame of the photomask assembly. The stress relief trenches may reduce or prevent damage to a pellicle that may otherwise result from deformation of the pellicle. The stress relief trenches may be formed in areas of the pellicle frame to allow the pellicle frame to deform with the pellicle, thereby reducing the amount damage to the pellicle caused by the pellicle frame.
    Type: Application
    Filed: June 15, 2023
    Publication date: October 12, 2023
    Inventors: Kuo-Hao LEE, You-Cheng JHANG, Han-Zong PAN, Jui-Chun WENG, Chiu-Hua CHUNG, Sheng-Yuan LIN, Hsin-Yu CHEN
  • Publication number: 20230323421
    Abstract: The invention relates to antisense oligonucleotides which alter the splicing of XBP1 pre-mRNA. The antisense oligonucleotides have applications in enhancing the level and/or quality of protein expression in cells and in mammalian protein expression systems, such as heterologous protein expression systems, such as enhancing antibody expression in CHO cells. The antisense oligonucleotides also have applications in therapy, such as for the treatment or prevention of proteopathological diseases.
    Type: Application
    Filed: June 22, 2023
    Publication date: October 12, 2023
    Applicant: Roche Innovation Center Copenhagen A/S
    Inventors: Styliani TOURNAVITI, Jonas VIKESAA, Shan-Hua CHUNG
  • Patent number: 11764166
    Abstract: Provided is a semiconductor package structure including a redistribution layer (RDL) structure, a chip, an electronic device and a stress compensation layer. The RDL structure has a first surface and a second surface opposite to each other. The chip is disposed on the first surface and electrically connected to the RDL structure. The electronic device is disposed in the RDL structure, electrically connected to the chip, and includes a dielectric layer disposed therein. The stress compensation layer is disposed in or outside the RDL structure. The dielectric layer provides a first stress between 50 Mpa and 200 Mpa in a first direction perpendicular to the second surface, the stress compensation layer provides a second stress between 50 Mpa and 200 Mpa in a second direction opposite to the first direction, and the difference between the first stress and the second stress does not exceed 60 Mpa.
    Type: Grant
    Filed: March 30, 2021
    Date of Patent: September 19, 2023
    Assignees: Industrial Technology Research Institute, Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jui-Wen Yang, Hsin-Cheng Lai, Chieh-Wei Feng, Tai-Jui Wang, Yu-Hua Chung, Tzu-Yang Ting
  • Publication number: 20230273220
    Abstract: The disclosure provides methods of using biomarkers to predict risk or likelihood and/or prognosis of and/or detect or diagnose substance use disorders or infections and/or monitor progress of substance use disorders and infections.
    Type: Application
    Filed: April 20, 2021
    Publication date: August 31, 2023
    Inventors: Yu-Li LIU, Yen-Feng LIN, Hsiao-Hui TSOU, Ren-Hua CHUNG
  • Patent number: 11726401
    Abstract: A photomask assembly may be formed such that stress relief trenches are formed in a pellicle frame of the photomask assembly. The stress relief trenches may reduce or prevent damage to a pellicle that may otherwise result from deformation of the pellicle. The stress relief trenches may be formed in areas of the pellicle frame to allow the pellicle frame to deform with the pellicle, thereby reducing the amount damage to the pellicle caused by the pellicle frame.
    Type: Grant
    Filed: July 27, 2022
    Date of Patent: August 15, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Hao Lee, You-Cheng Jhang, Han-Zong Pan, Jui-Chun Weng, Chiu-Hua Chung, Sheng-Yuan Lin, Hsin-Yu Chen
  • Patent number: 11728374
    Abstract: A capacitor structure for a power semiconductor device includes a semiconductor substrate, an isolation insulating layer having a ring-shape and including an outer periphery and an inner periphery defining an opening region, a first electrode disposed on the isolation insulating layer, a dielectric layer disposed on the first electrode, and a second electrode disposed on the dielectric layer.
    Type: Grant
    Filed: October 11, 2021
    Date of Patent: August 15, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hong-Yang Chen, Tian Sheng Lin, Yi-Cheng Chiu, Hung-Chou Lin, Yi-Min Chen, Kuo-Ming Wu, Chiu-Hua Chung
  • Publication number: 20230227968
    Abstract: Processing methods for forming iridium-containing films at low temperatures are described. The methods comprise exposing a substrate to iridium hexafluoride and a reactant to form iridium metal or iridium silicide films. Methods for enhancing selectivity and tuning the silicon content of some films are also described.
    Type: Application
    Filed: March 27, 2023
    Publication date: July 20, 2023
    Applicant: Applied Materials, Inc.
    Inventors: Feng Q. Liu, Hua Chung, Schubert Chu, Mei Chang, Jeffrey W. Anthis, David Thompson
  • Publication number: 20230207403
    Abstract: A semiconductor device assembly includes a substrate and a first semiconductor device mounted to the substrate. An epoxy-based spacer is mounted to the substrate proximate to the first semiconductor device by an adhesive attached to a bottom surface of the epoxy-based spacer and to the substrate. A second semiconductor device is mounted directly to top surfaces of both the first semiconductor device and the epoxy-based spacer.
    Type: Application
    Filed: October 27, 2022
    Publication date: June 29, 2023
    Inventors: Li Jao, Min Hua Chung, Chong Leong Gan
  • Publication number: 20230207642
    Abstract: A method for manufacturing a device may include providing an ultra-high voltage (UHV) component that includes a source region and a drain region, and forming an oxide layer on a top surface of the UHV component. The method may include connecting a low voltage terminal to the source region of the UHV component, and connecting a high voltage terminal to the drain region of the UHV component. The method may include forming a shielding structure on a surface of the oxide layer provided above the drain region of the UHV component, forming a high voltage interconnection that connects to the shielding structure and to the high voltage terminal, and forming a metal routing that connects the shielding structure and the low voltage terminal.
    Type: Application
    Filed: February 17, 2023
    Publication date: June 29, 2023
    Inventors: Yi-Cheng CHIU, Tian Sheng LIN, Hung-Chou LIN, Yi-Min CHEN, Chiu-Hua CHUNG
  • Patent number: 11688804
    Abstract: A semiconductor device and a manufacturing method thereof are provided. The semiconductor device has a source region and a drain region in a substrate, a gate structure and a metallic line. The source region surrounds the drain region in the substrate. The gate structure is disposed on the substrate, and disposed between the source region and the drain region. The gate structure surrounds the drain region. The metallic line is located above the source and drain regions and the gate structure and electrically connected to the drain region or the source region. The source region includes a doped region having a break region located between two opposite ends of the doped region. The metallic line extends from the drain region, across the gate structure and across the break region and beyond the source region.
    Type: Grant
    Filed: March 4, 2021
    Date of Patent: June 27, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Cheng Chiu, Tien-Sheng Lin, Sheng-Fu Hsu, Chen-Yi Lee, Chiu-Hua Chung